High Performance CMUT Arrays

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The proposed research will investigate current barriers that limit the full potential of capacitive micromachined ultrasonic transducers (CMUT) for use in commercial, medical, and industrial applications. Specifically, issues related to high efficiency ultrasound generation and detection, such as resonance frequency drift, electrical and acoustical crosstalk between the elements of a CMUT array, sensitivity, nonlinear dielectric charging, leakage current, and transducer insulation necessary for efficient moisture protection and patient isolation will be investigated. The investigation will include theoretical analysis, 3D simulation, statistical analysis, virtual prototyping, fabrication, and experimental methods to acquire, model, and validate new scientific knowledge that can be used to design high performance CMUT arrays. The research will advance the CMUT technology to be a powerful alternative to commercially available piezoelectric transducers for biomedical imaging and therapy, non-destructive testing, and automotive applications. This advanced technology will support the development and commercialization of many new and/or improved products along with the associated employment opportunities. The research will especially lead to the development of highly integrated transducers for new biomedical imaging modalities with higher performance that will be the technology of choice in future ultrasonic imaging systems utilizing catheter ultrasonic probes. It is expected that this will lead to the earlier and faster diagnosis of medical conditions when they are more readily curable and less costly to treat. Highly qualified personnel (Master's and Ph.D.) in the fields of microsystems, MEMS-based ultrasonic transducer design, simulation, fabrication, packaging, testing, data acquisition and software development will be trained during the project period. These skills are readily transferable to many other types of computer assisted design projects in a number of sectors important to Canada. Research results flowing from this methodology will be published in peer-reviewed high impact factor journals and international and national conferences. Any new intellectual property will be secured by patent filings through the university. This advancement and diffusion of knowledge will lead to the generation of intellectual property, paths to commercialization that can enhance the global competitiveness of Canadian firms, and provide enhanced ultrasound based health care to Canadians.