Multi-angle interferometer for quality assessment of mechanical parts integrated on coordinate-mesuring machines

用于集成在坐标测量机上的机械零件质量评估的多角度干涉仪

• 批准号: 488754-2015
• 负责人: Lesage, Frederic
• 金额: $ 0.91万
• 依托单位: École Polytechnique de Montréal
• 依托单位国家: 加拿大
• 项目类别: Engage Plus Grants Program
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=586393
• 关键词: Multi; angle; interferometer; quality; assessment

In the field of mechanical fabrication, the ability to perform on site and automatized inspection is becoming necessary and this requires the fabrication of new instruments enabling high resolution measurements integrated on coordinate-measuring machines (CMM). In this project, we will develop a dedicated instrument based on interferometry that can measure surfaces with height inhomogeneity with high axial resolution (1 µm) and from multiple angles. Using a wide bandwidth laser and a rotating prism to vary the interferometer reference arm length (delay line), the system will be able to image upwards 8 mm depth with micron resolution for each angle. The system will be integrated within a coordinate measurement machine using long optical fibres to enable automatized measurement and quality inspection of mechanical parts.

在机械制造领域，现场执行和自动化检测的能力正在成为 这就需要制造能够进行高分辨率测量的新仪器 集成在坐标测量机（CMM）上。在这个项目中，我们将开发一种专用仪器， 基于干涉测量法，可测量高度不均匀的表面，具有高轴向分辨率（1 µm） 从多个角度观察。使用宽带激光器和旋转棱镜来改变干涉仪 参考臂长（延迟线），系统将能够以微米分辨率成像8 mm以上的深度 每个角度。该系统将集成在一个坐标测量机使用长光学 光纤，以实现机械零件的自动化测量和质量检测。