Multi-angle interferometer for quality assessment of mechanical parts integrated on coordinate-mesuring machines

在机械制造领域，现场自动检测的能力正在变得越来越强 这是必要的，这需要制造能够进行高分辨率测量的新仪器 集成在坐标测量机(CMM)上。在这个项目中，我们将开发一种专用仪器 基于干涉测量法，可测量高度不均匀的表面，轴向分辨率高(1微米) 而且是从多个角度。利用宽带激光器和旋转棱镜改变干涉仪 参考臂长(延迟线)，系统将能够以微米分辨率成像到8 mm深度 对于每个角度。该系统将集成在使用Long光学技术的坐标测量机中 纤维，以实现机械部件的自动化测量和质量检查。

In the field of mechanical fabrication, the ability to perform on site and automatized inspection is becoming necessary and this requires the fabrication of new instruments enabling high resolution measurements integrated on coordinate-measuring machines (CMM). In this project, we will develop a dedicated instrument based on interferometry that can measure surfaces with height inhomogeneity with high axial resolution (1 µm) and from multiple angles. Using a wide bandwidth laser and a rotating prism to vary the interferometer reference arm length (delay line), the system will be able to image upwards 8 mm depth with micron resolution for each angle. The system will be integrated within a coordinate measurement machine using long optical fibres to enable automatized measurement and quality inspection of mechanical parts.