Femtosecond laser micromachining of GaN

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Two-Photon Research is a Montreal based company that specializes in III-V materials and their applications in imaging for industrial applications. In particular they have devices based on GaN semiconductor. Such semiconductors are grown on wafers which are to be subsequently cut for further processing and packaging into devices. The key industrial problem for Two-Photon Research is to be able to cut the GaN wafers with micron level precision without destroying the devices and structures in the GaN wafer. Such a clean cut is possible for the commonly used Si wafers using well-established mechanical cutting method. In contrast, mechanical cutting is not able to process GaN with the required precision that will enable eventual device packaging and integration. Two-Photon Research has presented an industrial need that the Kambhampati group can readily address. Recent work in the materials processing field has demonstrated that femtosecond lasers can cut a variety of materials with unprecedented precision and cleanliness of features. Two-Photon has initial work that has confirmed that femtosecond lasers can indeed cut their GaN with the desired performance targets. However, they lack the lasers and optics expertise required to further optimize the manufacturing processes. This need presents an opportunity for synergistic collaboration. With our infrastructure and expertise, we are poised to rapidly address the industrial needs of Two-Photon Research. We will focus on a company specific challenge that is on the critical path for their development of their devices. This specific challenge is to understand the relationship between the optical pulses which cut the semiconductors, and the quality of the cutting and micromachining.