Enhancing conductivity of laser fabricated porous silicon substrates with Graphene and Metal by Atomic Layer Deposition (ALD)

通过原子层沉积 (ALD) 增强激光制造的石墨烯和金属多孔硅基底的导电性

• 批准号: 516414-2017
• 负责人: Kiani, Amirkianoosh
• 金额: $ 1.82万
• 依托单位: University of Ontario Institute of Technology
• 依托单位国家: 加拿大
• 项目类别: Engage Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639985
• 关键词: Enhancing; conductivity; laser; fabricated; porous

In this project, we introduce a new method for laser-based fabrication of nanofibrous silicon structures induced by laser pulses. Single crystalline silicon wafers are laser processed using a pulsed nanosecond laser system at different laser parameters before undergoing metallic and graphene Atomic Layer Deposition (ALD).Based on previous studies, when processed to be nanofibers, Si has shown promising biocompatibility; however, its conductivity is reduced due to oxidization. To overcome this, conductive biomaterial (e.g., gold, platinum, graphene, silver) embedding through ALD is proposed in this research as a means of controlling and further imparting electrical properties to laser-induced silicon oxide nanofibers. The metallic infused samples result in greater conductivities at higher embedded nanomaterial concentrations, especially in samples with smaller fiber sizes.The process developed through this research project will produce commercial quality sensors for IoT applications including health monitoring. The product can be used in data-centre interconnect with optical devices.

在这个项目中，我们介绍了一种新的方法，用于激光脉冲诱导纳米纤维硅结构的激光加工。在进行金属和石墨烯原子层沉积（ALD）之前，使用脉冲纳秒激光系统在不同的激光参数下对单晶硅晶片进行激光加工。根据先前的研究，当加工成纳米纤维时，Si显示出良好的生物相容性;然而，由于氧化，其导电性降低。为了克服这一点，导电生物材料（例如，金、铂、石墨烯、银）作为控制和进一步赋予激光诱导的氧化硅纳米纤维电学性质的手段。金属注入的样品在更高的嵌入纳米材料浓度下导致更大的电导率，特别是在具有较小纤维尺寸的样品中。通过该研究项目开发的工艺将为物联网应用（包括健康监测）生产商业质量的传感器。该产品可用于数据中心与光学设备的互连。