Enhancing conductivity of laser fabricated porous silicon substrates with Graphene and Metal by Atomic Layer Deposition (ALD)

在这个项目中，我们介绍了一种由激光脉冲诱导的基于激光的纳米纤维硅结构制造的新方法。利用脉冲纳秒激光系统在不同激光参数下对单晶硅片进行激光加工，然后进行金属和石墨烯原子层沉积（ALD）。根据以往的研究，当硅被加工成纳米纤维时，它表现出了良好的生物相容性；但其导电性因氧化而降低。为了克服这一问题，本研究提出通过ALD嵌入导电生物材料（如金、铂、石墨烯、银），作为控制和进一步赋予激光诱导氧化硅纳米纤维电性能的手段。金属注入的样品在较高的嵌入纳米材料浓度下具有更高的电导率，特别是在纤维尺寸较小的样品中。通过该研究项目开发的过程将为包括健康监测在内的物联网应用生产商用质量传感器。该产品可用于数据中心与光器件的互连。

In this project, we introduce a new method for laser-based fabrication of nanofibrous silicon structures induced by laser pulses. Single crystalline silicon wafers are laser processed using a pulsed nanosecond laser system at different laser parameters before undergoing metallic and graphene Atomic Layer Deposition (ALD).Based on previous studies, when processed to be nanofibers, Si has shown promising biocompatibility; however, its conductivity is reduced due to oxidization. To overcome this, conductive biomaterial (e.g., gold, platinum, graphene, silver) embedding through ALD is proposed in this research as a means of controlling and further imparting electrical properties to laser-induced silicon oxide nanofibers. The metallic infused samples result in greater conductivities at higher embedded nanomaterial concentrations, especially in samples with smaller fiber sizes.The process developed through this research project will produce commercial quality sensors for IoT applications including health monitoring. The product can be used in data-centre interconnect with optical devices.