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Urgent Upgrade of Atomic Layer Deposition with Plasma Capability to Accelerate Energy Storage, Energy Conversion and Gas Sensing Research

紧急升级具有等离子体能力的原子层沉积，以加速能量存储、能量转换和气体传感研究

基本信息

批准号：
RTI-2019-00443
负责人：
Liu, Jian
金额：
$ 7.61万
依托单位：
University of British Columbia
依托单位国家：
加拿大
项目类别：
Research Tools and Instruments
财政年份：
2018
资助国家：
加拿大
起止时间：
2018-01-01 至 2019-12-31
项目状态：
已结题

来源：
https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=657753
关键词：
Urgent Upgrade Atomic Layer Deposition

项目摘要

This proposal is for the purchase of a plasma source to upgrade an existing Thermal Atomic Layer Deposition equipment to a Plasma-Enhanced Atomic Layer Deposition (PE-ALD). The upgraded PE-ALD system will have unprecedented capabilities for nanoscale thin film deposition. It will be used to enhance research innovation and student training for research programs in three themes - energy storage, energy conversion, and gas sensing – in the Engineering and Chemistry Departments at UBC Okanagan campus.******Energy conversion and storage systems play key roles in the deployment of renewable energy and the reduction of greenhouse gas emissions. Gas sensor devices are increasingly adopted to detect pollutants, toxic compounds and explosive for monitoring air quality and domestic safety. However, sustainable commercialization of these technologies remains limited by their low efficiency, practical energy density, or sensitivity. The performance of these technologies greatly depends on the gas-liquid-solid interfaces, at/across which transport of ions and/or electrons occur. To further improve their performance, it is critical to explore emerging new materials and concepts for designing stable, nanoscale, and efficient interfaces in these systems.******With this plasma upgrade, the PE-ALD will enable the deposition of new functional materials (N and S containing solid electrolytes, metal nitrides, sulfides and selenides) and higher-quality thin films at reduced deposition temperatures, therefore providing enhanced capabilities for interface design in rechargeable batteries, solar cells, and gas sensors. This will not only accelerate these technologies for commercial deployment, but also advance knowledge in fundamental interfacial science. The research innovations are important for enabling a greener, safer, and better lifestyle for all Canadians. **

本建议书旨在购买等离子体源，将现有的热原子层沉积设备升级为等离子体增强原子层沉积（PE-ALD）。升级后的PE-ALD系统将具有前所未有的纳米薄膜沉积能力。它将用于加强研究创新和学生培训的研究计划在三个主题-能源储存，能源转换和气体传感-在工程和化学部门在UBC Okanagan校园。能源转换和储存系统在部署可再生能源和减少温室气体排放方面发挥着关键作用。气体传感器设备越来越多地用于检测污染物、有毒化合物和爆炸物，以监测空气质量和家庭安全。然而，这些技术的可持续商业化仍然受到其低效率、实际能量密度或敏感性的限制。这些技术的性能在很大程度上取决于气-液-固界面，离子和/或电子的传输发生在气-液-固界面处/穿过气-液-固界面。为了进一步提高它们的性能，探索新兴的新材料和概念以在这些系统中设计稳定的、纳米级的和有效的界面是至关重要的。通过这种等离子体升级，PE-ALD将能够在降低的沉积温度下沉积新的功能材料（含N和S的固体电解质，金属氮化物，硫化物和硒化物）和更高质量的薄膜，从而为可充电电池，太阳能电池和气体传感器的界面设计提供增强的能力。这不仅将加速这些技术的商业部署，而且还将推进基础界面科学的知识。研究创新对于为所有加拿大人提供更环保，更安全和更好的生活方式非常重要。**