Urgent Upgrade of Atomic Layer Deposition with Plasma Capability to Accelerate Energy Storage, Energy Conversion and Gas Sensing Research

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This proposal is for the purchase of a plasma source to upgrade an existing Thermal Atomic Layer Deposition equipment to a Plasma-Enhanced Atomic Layer Deposition (PE-ALD). The upgraded PE-ALD system will have unprecedented capabilities for nanoscale thin film deposition. It will be used to enhance research innovation and student training for research programs in three themes - energy storage, energy conversion, and gas sensing – in the Engineering and Chemistry Departments at UBC Okanagan campus.******Energy conversion and storage systems play key roles in the deployment of renewable energy and the reduction of greenhouse gas emissions. Gas sensor devices are increasingly adopted to detect pollutants, toxic compounds and explosive for monitoring air quality and domestic safety. However, sustainable commercialization of these technologies remains limited by their low efficiency, practical energy density, or sensitivity. The performance of these technologies greatly depends on the gas-liquid-solid interfaces, at/across which transport of ions and/or electrons occur. To further improve their performance, it is critical to explore emerging new materials and concepts for designing stable, nanoscale, and efficient interfaces in these systems.******With this plasma upgrade, the PE-ALD will enable the deposition of new functional materials (N and S containing solid electrolytes, metal nitrides, sulfides and selenides) and higher-quality thin films at reduced deposition temperatures, therefore providing enhanced capabilities for interface design in rechargeable batteries, solar cells, and gas sensors. This will not only accelerate these technologies for commercial deployment, but also advance knowledge in fundamental interfacial science. The research innovations are important for enabling a greener, safer, and better lifestyle for all Canadians. **