Advanced instrumentation for multi-modal nanometric measurement inside SEM

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The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterials**and nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sized**transistors for failure analysis, and lithium ion battery development requires characterization of**nanomaterials-based electrode property changes during electrochemical cycles. Our research group previously**developed a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)**to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon the**previous work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to develop**a new instrument and a number of nano characterization techniques, which will, for the first time, enable**comprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials under**SEM imaging.**The goal of the project is to develop a new instrument capable of multi-modal imaging and nano**characterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:**(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To develop**techniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with the**capability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)**probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM module**for the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) To**enable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber of**SEM. This powerful nano instrument will find important applications in such industries as nano electronics,**precision instrumentation, batteries etc