Advanced instrumentation for multi-modal nanometric measurement inside SEM

点击翻译按钮获取中文摘要

The nanotechnology sector demands advanced capabilities for measuring physical properties of nanomaterialsand nanostructures. For instance, the semiconductor industry requires the probing of nanometer-sizedtransistors for failure analysis, and lithium ion battery development requires characterization ofnanomaterials-based electrode property changes during electrochemical cycles. Our research group previouslydeveloped a closed-loop operated nanomanipulation system for use inside scanning electron microscope (SEM)to perform the manipulation of nanomaterials under SEM's nanometer resolution imaging. Building upon theprevious work, we will collaborate with Hitachi High-Technologies Canada (HHTC) in this project to developa new instrument and a number of nano characterization techniques, which will, for the first time, enablecomprehensive physical (electrical, mechanical, and thermal) measurements on nano structures/materials underSEM imaging.The goal of the project is to develop a new instrument capable of multi-modal imaging and nanocharacterization techniques for operation inside the high vacuum chamber of SEM. Specific objectives include:(1) To develop a nanomanipulation instrument with low sensor heat generation and low drift; (2) To developtechniques for automated electrical probing of nanoelectronic structures; (3) To equip the instrument with thecapability of thermal mapping on nanomaterials; (4) To apply the instrument to perform integrated circuit (IC)probing and thermal measurement on 1D and 2D nanomaterials inside SEM; (5) To develop an AFM modulefor the instrument to enable in-situ AFM imaging, including both contact and tapping mode scanning; (6) Toenable AFM-SEM correlative imaging and mechanical nanoindentation inside the high vacuum chamber ofSEM. This powerful nano instrument will find important applications in such industries as nano electronics,precision instrumentation, batteries etc