A versatile multi-project cleanroom fabrication process for superconducting quantum circuits

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Quantum information technology is currently transiting from academia to industry and the complexity of nanofabrication processes for state-of-the-art devices is growing rapidly. It is now exceeding the research and development capacity of start-up companies or academic research groups. In order to ensure continuous progress of quantum information technology, it is, therefore, necessary to pool the manufacturing efforts of small companies and research groups so as not to restrict the use of this strategic technology to a few large multinational companies. The goal of this project is to set up a pilot line for shared nanofabrication of state-of-the-art superconducting circuits in Canada. The project is based on a close collaboration between experts in superconducting quantum circuits at Institut Quantique (IQ) of Université de Sherbrooke (UdeS) and experts in micro- and nanofabrication at 3IT of UdeS where the transition to shared manufacturing has already taken place. The industrial partner CMC Microsystems, an expert in the mutualization of processes and tools for the Canadian academic and industrial world, will ensure that the project corresponds to the needs of the market. Equipment manufacturers Angstrom Engineering and Raith will contribute their expertise in thin film deposition and e-beam lithography to the project which will in turn help them to optimize their tools for quantum systems. The results of this project will be used directly by the industrial partner Nord Quantique, a start-up company in Sherbrooke that manufactures superconducting quantum circuits.