真空带状阴极电弧等离子体产生、过滤机理研究

弯管式真空电弧磁过滤技术离化率高且成膜质量好，但效率低、出口均匀性差。申请人在矩形电弧靶面设计出斑点扫描磁场和电弧弯曲磁场，巧妙地在靶前形成磁场奇点区，消除了传输磁场对电弧稳定性的影响，获得了高效、均匀带状真空电弧等离子体，但其物理机理尚不清楚，项目拟以C、Ti、Cu等阴极电弧等离子体为样本，开展不同扫描磁场及弯曲磁场状态下带状真空阴极电弧等离子体的膨胀机理研究；开展RCAP的产生、传输、分布和控制理论研究；开展RCAP离子荷电态分布规律研究。同时研究影响RCAP离子分布的相关控制物理参量，探索带状阴极电弧磁过滤装置对离子不同价态离子进行群分的可行性。并以碳等离子体为例，研究C离子价态群分后不同价态C离子对DLC膜的SP3与SP2杂化键的影响，从量子的角度探索离子电荷态分布与碳膜杂化键形成的对应关系，为调控碳基薄膜功能结构提供理论支持。

High quality films can be deposited by quarter torus cathodic arc deposition filter which is a double sword because it can produce high ionization rate plasma as well as the disadvantage of low productivity and nonuniform. Ribbon-like Cathodic Arc Plasma (RCAP) in a magnetic field singularity area adjoins the cathode, which was created by combining a scanning magnetic field and a curved magnetic field, was novelly created. The Ribbon-like Cathodic Arc Plasma magnetic filter was invented and the instability due to the curved magnetic field was successfully prevented. The expansion of RCAP of C, Ti and Cu would be researched under difference scanning magnetic field and curved magnetic field parameters. The creation, transmission, distribution and controlling of RCAP as well as the ion charge distribution will be studied. The effects of RCAP filter controlling parameters and the possibility of grouping ions according to their discharge will be explored. The effects of the grouping Carbon ions on the formation of sp3 and sp2 bond in DLC films in a quantum view will also investigated to support the tailoring the structure and properties of Carbon films.