功能复合薄膜材料在微器件领域有十分重要的应用。人们已经发现铁电材料和磁性材料之间存在耦合效应，从而推动了多铁性材料和多铁器件的研究。近年来的研究表明超导体和铁电体之间也存在交互作用，如铁电极化可以改变超导临界转变温度、超导电性也会影响铁电极化特性。深入研究这类材料的交互作用及其机理，不仅有助于深入了解高温超导的超导机理，还有可能发展出类似于多铁器件的另一类新型微电子器件。本课题拟选择几种钙钛矿类陶瓷薄膜作为铁电材料，以YBa2Cu3O7(YBCO)作为超导材料，制备具有共格界面的铁电/超导异质结构，研究铁电与高温超导之间的交互作用及其机理，期待发现新的耦合效应，从而为复合多功能器件的开发提供一种新材料、新方法。此外，在制备铁电/超导异质结的基础上，结合感光溶胶-凝胶微细加工技术，按照特定器件的要求将异质结制作成微细图形，研究这类异质结的尺寸效应及在微器件中的应用的可能性。

Multifunctional films play a very important role in the application of microelectric devices. A coupling effect between ferroelectric and ferromagnetic materials has been found before a dozen years, which has been promoting the research and development of multiferroic materials and their integration devices. Recently, a similar coupling effect between ferroelectric and superconducting materials was also discovered. The research results showed that ferroelectric polarization can improve the critical transition temperature of superconductor and in turn the superconductivity can influence the ferroelectric polarization. To make an in-deep study on the coupling effect between the two kinds of materials can not only help us understand deeply the mechanism of high-temperature superconductor, but also may develop a novel type of microelectronic devices similar with the multiferroic devices. In this study, several perovskite ceramics are used as ferroelectric material and YBa2Cu3O7 (YBCO) is used as superconducting material to prepare ferroelectric/superconductor heterostructure with coherent interface and investigate the coupling effect between ferroelectric and superconductor. Several new coupling effects are expected to reveal and the results will provide a novel material and approach for the development of multifunctional microelectric devices. In addition, according to the requirements for device fabrication the ferroelectric/superconductor heterostructures are photoetched into fine patterns by using a photosensitive sol-gel microfabrication technology. Meaningwhile, the size effect and the possibility for microelectric device application of these heterostructures are investigated.