石墨烯有着高导电、高透光及超强的断裂韧性；透明导电氧化物（TCO）薄膜除了透明导电性能外，还表现出良好耐磨性、可刻蚀性及与基体的良好结合力。二者优势互补，研制可作为窗口电极材料的石墨烯/TCO超薄薄膜。探讨磁控溅射工艺及后处理工艺对石墨烯叠层完整性、石墨烯/TCO导电性作用的物理机制；研究再结晶超薄TCO薄膜的光电性能与晶界面积、掺杂及氧空位造成的晶格缺陷的关系，明确本征及掺杂TCO薄膜中带电粒子的散射机理，探讨晶界散射对再结晶超薄TCO薄膜带电粒子运动的作用；研究基体/石墨烯/TCO、基体/TCO/石墨烯/TCO两种复合形式下，复合界面对超薄膜的断裂韧性（可挠曲性）、导电性作用。对这种新型窗口电极薄膜材料的工艺、性能及导电机理的研究，将向超薄方向拓展TCO薄膜使用，也将成为石墨烯的工业化应用的理论和实践指导。

Graphene, due to its two-dimensional sp2 structure and single atomic layer, have excellent conductivity, transmittance and fracture toughness; transparent conductive oxide (TCO) films show their good properties, such as abrasion resistance, etching and adhesion to substrates as well as transmittance and conductivities. Taking the advantages of these two materials, this project will focus on the study of the window electrode multilayer ultra-thin films, i.e. TCO based on graphene, prepared by RF magnetron sputtering. The effect of the sputtering parameters, especially the methods of biasing substrates, on the integration of the graphene and conductive mechanism of the graphene/TCO films is going to be investigated. Also, the electron scattering mechanisms will be explored. Another aspect in this project to be studied is the determination of the relationship between the crystal boundary, lattice deformation and optical, electrical properties of the recrystallized intrinsic and doped TCO. The toughness and optical, electrical properties of the ultra-thin multilayer films, in the structures of substrate/graphene/TCO and substrate/TCO/graphene/TCO, is going to be examined, and the effect of the interface on the electron mobility discussed. The studies of the window electrode multilayer films, including the preparation techniques, properties of the films and conductive mechanisms, is going to be the theoretical and practical guides for the development of graphene on industrial applications. Also, this stufy will lead the development of ultra-thin TCO films.