Two-Dimensional Long Wavelength Bolometer Arrays for Astronomy Applications

提出了一种制造可在室温和低温下工作的大面积长波红外（LWIR）探测器阵列的创新方法。该技术利用硅（Si）晶圆的微加工和微电子加工技术来制造LWIR探测器的单片阵列。该阵列的探测器元件由具有已知最高电阻温度系数的测热计材料的超薄薄膜构成，读出电子微电路制作在元件旁边的同一硅芯片上。由此产生的探测器阵列将具有低成本、低重量、高响应度和高灵敏度的特点。低成本是由于单片阵列结构不需要冷却。这种新型测热计材料具有很高的电阻率温度系数（传统测热计温度系数大于15% ~ 0.2%），因此具有很高的响应率。高灵敏度是由于高响应性、低噪声和高热隔离与周围环境的综合作用。

An innovative method of fabricating large-area long wavelength infrared (LWIR) detector arrays that can be operated at room as well as cryogenic temperatures is proposed. This technique uses established technologies of micro-machining and microelectronic processing of silicon (Si) wafers for fabricating monolithic arrays of LWIR detectors. The detector elements of the array are formed by an ultra-thin film of a bolometer material possessing the highest temperature coefficient of resistance known, and the readout electronic microcircuit is fabricated on the same silicon chip next to the elements. The resultant detector arrays will possess features of low cost, low weight, high responsivity and high sensitivity. The low cost is due to a monolithic array structure requiring no cooling. The high responsivity is due a large to a large temperature coefficient of resistivity (greater than 15% to 0.2% for a conventional bolometer) of the new bolometer material. The high sensitivity is due to the combined effects of high responsivity, low noise and high thermal isolation of the bolometer from its surroundings.