Development of Spectroscopic Ellipsometry as a Non- Destructive Characterization Tool for Ceramic Materials

这是一份提交给妇女研究机会（ROW）项目的研究计划拨款（RPG）提案。提出的工作使用光谱椭偏法（SE）作为薄膜和渐变折射率透明材料的无损表征工具。将研究测量技术的灵敏度极限。所测薄膜折射率的绝对精度将作为所测薄膜厚度和涂层与衬底之间的折射率对比的函数来计算。薄膜沉积条件和薄膜质量之间的定量关联将被建立。它可以起到促进均匀和高质量薄膜生产的作用。本研究使用光谱椭偏法（SE）作为薄膜和渐变折射率透明材料的无损表征工具。它计划检查测量灵敏度的极限，并试图将薄膜中微观结构不均匀性的影响与材料的实际光学特性分开。透明薄膜在这个光通信时代是很重要的。本研究为如何提高电影质量提供了定量的措施。它在提高光通信应用方面的潜力是巨大的。* * *

9308332 Trolier-McKinstry This is a Research Planning Grant (RPG) proposal submitted to the Research Opportunity for Women (ROW) Program. The proposed work uses the spectroscopic ellipsometry (SE) as a nondestructive characterization tool for thin film and graded refractive index transparent materials. The limits of sensitivity of the measuring techniques will be investigated. The absolute accuracy of the measured film refractive index will be calculated as a function of the measured film thickness and the refractive index contrast between the coating and the substrate. Quantitative correlations between film deposition conditions and the film qualities will be made. It can have the effect of facilitating the production of homogeneous and high-quality films. %%% This proposed work uses the spectroscopic ellipsometry (SE) as a nondestructive characterization tool for thin film and graded refractive index transparent materials. It plans to examine the limits of sensitivity of the measurements, and it seeks to separate the effect of microstructural inhomogeneities in the films from the actual optical properties of the material. Transparent films are important in this age of optical communications. This study provides quantitative measures in how to improve the qualities of the films. Its' potentials to improve the optical communication application are very great. ***