Laser Interferometry Measurement System for Mechanical Vibration Research

小行星9311215 在本项目中，开发了一种激光干涉测量系统，用于在振动、声学和动力学领域进行实验研究。具体项目包括轴向移动的材料和设备，如高速磁带和磁光磁带，动力传输椅子和皮带的动力学。此外，微机械结构的动力学进行了研究，以确定振动的问题，成为显着时，机械结构显着缩小尺寸，例如，通过硅微加工技术。 表征这种系统的动态特性通常是具有挑战性的，因为基本振动频率可能非常高，振动幅度在亚微米范围内。该项目中使用的干涉仪具有10至100 pem之间的激光光斑尺寸，至少500 μ m的带宽;位移测量的分辨率在0.008 pem至20 pem之间变化，速度测量的分辨率在0.5 pem/sec至10 pem/sec之间变化。该系统提供了一个可靠的工具，获得微观机械结构动力学的基本理解。

9311215 Wickert In this project a laser interferometry system is developed for conducting experimental research in the areas of vibration, acoustics and dynamics. Specific projects include the dynamics of axially moving materials and devices such as high speed magnetic and magneto-optical tapes, and power transmission chairs and belts. Also, the dynamics of micromechanical structures is investigated to identify the vibration issues that become significant when mechanical structures are significantly down- sized, for instance, through silicon micro-machining techniques. Characterizing the dynamics of such systems is generally challenging since the fundamental vibration frequencies can be extremely high, with the vibration amplitudes being in the sub- micron range. The interferometer used in the project has a laser spot size between 10 and 100 pem, a bandwidth of a least 500 khz; and a resolution that is variable between 0.008 pem and 20 pem for displacement measurements, and between 0.5 pem/sec and 10 pem/sec for velocity measurements. The system provides a reliable vehicle for obtaining fundamental understanding of micro- mechanical structural dynamics.