Analysis and Design of a Long Range Scanning Stage

小行星9414778 该奖项旨在研究分析，构建和测试具有25埃分辨率的精密磁悬浮六自由度运动控制平台。 工作空间为25 mm × 25 mm × 100微米。 该平台将具有5纳米的重复性和20纳米的精度。 该平台使用混合磁/流体轴承结构，油提供机械阻尼，电磁致动器施加控制力。 将开发集成电路电容位移探头以及具有增强分辨率的多程激光干涉仪。 机械设计和电磁致动器拓扑结构，以实现所需的旅行和致动器的目标也将开发。 系统集成和控制问题也将得到解决。 该阶段将使成像组的原子结合探测显微镜。 此外，这将是有用的测量与现在和未来几代的集成电路，光掩模，和微机械致动器。

9414778 Trumper The award is for research to analyze, construct, and test a precision magnetically-suspended six degree-of-freedom motion control stage with 25 angstrom resolution. The workspace is 25 mm by 25 mm by 100 micrometers. The stage will have a repeatability of 5 nanometers, and an accuracy of 20 nanometers. The stage uses a hybrid magnetic/fluid bearing structure, the oil providing mechanical damping and the electromagnetic actuators imposing control forces. Integrated circuit capacitance displacement probes will be developed as will a multipass laser interferometer with enhanced resolution. Mechanical designs and electromagnetic actuator topologies to achieve the desired travel and actuator goals will also de developed. System integration and control issues will also be addressed. The stage will enable imaging of groups of atoms in conjunction with probed microscopes. In addition, it would be useful for measurements associated with present and future generations of integrated circuits, photo-masks, and micromechaical actuators.