Ion Implanted Thin Film Zinc Gallate Phosphors for Field Emission Displays

这个小企业创新研究一期项目Spire提出开发没食子酸锌（ZnGa2O4）作为薄膜宿主荧光粉，并通过选择性离子注入该材料的公认发光中心，即Cr， Mn, Ga，来生产全彩色（红，绿，蓝）面板。在美国，基于阴极发光（CL）荧光粉的场发射显示器（fed）正迅速成为平板显示器最受欢迎的体现，许多努力正在进行中，以使fed进入市场。然而，由于其颗粒性质和有限的使用寿命，传统的硫化物基粉末荧光粉会影响FED的性能。用物理气相沉积生产的无硫薄膜氧化物材料代替粉末状荧光粉可以改善色度，允许更精细的清晰度，减少荧光粉降解，同时有助于过程自动化，从而控制制造成本。在ARPA赞助的平行项目中，Spire在荧光粉中使用离子注入，证明了具有ZnS:Mn的50 fL （60 Hz）黄色和具有CaGa2S4:Ce的1 fL （60 Hz）蓝色薄膜电致发光；和15 fL （1 mA/cm2）绿色的Zn2SiO4:Mn薄膜阴极发光，所有的最先进的亮度水平。拟议的程序将在单个FED面板上的相邻线条中展示所有三种颜色。第二阶段将通过研究各种纹理方法来最小化波导，优化荧光粉化学并提高外部效率。

This Small Business Innovation Research Phase I Project Spire proposes to develop zinc gallate (ZnGa2O4) as a thin-film host phosphor, and produce full color (red, green, blue) faceplates by selective ion implantation of recognized luminescent centers for this material, viz., Cr, Mn, Ga. Field emission displays (FEDs) based on cathodoluminescent (CL) phosphors are rapidly becoming the favorite embodiment for flat panel displays in America, and many efforts are underway to bring FEDs into the marketplace. However, due to their granular nature and limited operating lifetime, conventional sulfide-based powder phosphors compromise FED performance. Replacing powdered phosphors with sulfur-free, thin film oxide materials produced by physical vapor deposition can improve chromaticity, allow much finer definition, and reduce phosphor degradation while aiding in process automation to allow control of manufacturing costs. In parallel ARPA sponsored programs, Spire has used ion implantation in phosphors to demonstrate 50 fL (60 Hz) yellow with ZnS:Mn and 1 fL (60 Hz) blue with CaGa2S4:Ce for thin film electroluminescence; and 15 fL (1 mA/cm2) green with Zn2SiO4:Mn for thin film cathodoluminescence, all state-of-the-art brightness levels. The proposed program will demonstrate all three colors in adjacent lines on a single FED faceplate. Phase II will optimize phosphor chemistry and improve external efficiency by studying various texturing approaches to minimize waveguiding.