Fundamental Investigation of Micro-scale Friction and Wear Mechanisms in Microelectromechanical Systems (MEMS)

9504403 Komvopoulos与微机电系统（MEMS）相关的粘附和微摩擦学现象将被研究。将建造特殊的微机械装置来测量所涉及的非常微小的力。重点将放在研究高摩擦导致粘在微机械的操作过程中，由于毛细，范德华，和静电力的影响。实验研究将辅以正常接触和滑动接触的分子动力学模拟，以分析摩擦对晶格参数、运动方向和速度以及温度的依赖。从压痕测量本构关系将发展为评估摩擦学结果。＊＊＊

9504403 Komvopoulos The adhesion and microtribological phenomena of relevance to microelectromechanical systems (MEMS) will be studied. Special micromechanical devices will be constructed to allow measurement of the very minute forces involved. Emphasis will be given to the study of high friction leading to sticking during operation of micromachines due to capillary, van der Waals, and electrostatic force effects. The experimental studies will be supplemented with molecular dynamics simulations of normal and sliding contacts to analyze the dependence of friction on lattice parameters, direction and speed of motion, and temperature. From indentation measurements constitutive relations will be developed for evaluation of the tribological results. ***