Acquisition of In-Situ Heating and Ambient Controlled X-Ray Deffraction Tool: For Remote Research and Education

9704269阿尔福德该奖项由材料研究部、多学科活动办公室和亚利桑那州立大学为配置高温样品台组件的X射线衍射仪(X射线衍射仪)提供部分支持，用于材料研究。该衍射仪将作为一种远程分析工具，学生和研究人员可以在教室和其他地点使用。亚利桑那州立大学(ASU)的学生和教职员工将使用衍射仪为未来(0.18米)集成电路技术创造互连材料系统和工艺的科学和工程方面的新基础知识。银金属化是未来微电子互连系统的技术驱动力。本研究集中于金属导体材料(银及其合金)在受控气氛下的热加工过程的现场研究。这项工作将在i)银和铜金属化材料科学和加工以及ii)薄膜SiGEC合金的X射线衍射(XRD)分析方面取得初步进展。%与亚利桑那州立大学青年准备办公室合作，亚利桑那州立大学材料研究学会(MRS)和全国黑人工程师学会(NSBE)的本科生和研究生将被组织和赞助，向凤凰城的小学和高中举办科学展览。来自MRS和NSBE的学生将在当地学校进行X射线衍射仪演示，并将能够通过互联网连接远程控制工具。目前正在规划一个X光表征课程，并将在亚利桑那州立大学与马里科帕社区学院区合作提供这一课程。这门课程是关于样品分析的现代X射线衍射物分析技术，将向亚利桑那州立大学的学生、社区学院的学生和当地行业提供。这一独特的分析工具将补充亚利桑那州立大学固态科学中心以及高分辨率X射线设备提供的表征设施。这种组织结构充分利用了亚利桑那州立大学的设施，并整合了亚利桑那州立大学的一系列研究和教育项目，包括亚利桑那州立大学少数民族项目联盟、NSF资助的材料合成与加工课程开发补助金以及NSF/大学/州立低功率电子中心。***

9704269 Alford This award provides partial support by The Division of Materials Research, The Office of Multidisciplinary Activities, and the Arizona State University for an X-Ray Diffractometer (XRD) configured with a High Temperature Sample Stage Assembly for materials research. This diffractometer will serve as a remote analytical tool that can be accessed by students and researchers in the class room and at other locations. Students and faculty at Arizona State University (ASU) will use the diffractometer to create new fundamental knowledge in the science and engineering of interconnect materials systems and processes for future ( 0.18 m) integrated circuit technologies. Silver metallization is the technology driver for future microelectronics interconnect systems. This investigation concentrates on the in-situ study of metal conductor materials (silver and its alloys) during thermal processing in controlled ambients. This effort will extend upon preliminary advances in both i) Ag and Cu metallization materials science and processing and ii) x-ray diffraction (XRD) analysis of thin film SiGeC alloys. %%% In collaboration with the ASU Office of Youth Preparation, ASU undergraduates and graduate students from the Materials Research Society (MRS) and the National Society of Black Engineers (NSBE) will be organized and sponsored to present science exhibitions to Elementary and High Schools in Phoenix. Students from MRS and NSBE will conduct XRD demonstrations at the local schools and will be able to control the tool remotely via a Internet connection. A x-ray characterization course is being planned and will be offered at ASU in collaboration with Maricopa Community College District. This course is on modern XRD analysis techniques for specimen analysis and it will be delivered to ASU students, Community College students, and local industry. This unique analysis tool will complement characterization facilities provided by the ASU Center for Solid State Science as well as the High Resolution X-ray Facility. This organizational structure leverages facilities and integrates a number of research and education programs at ASU, including the Alliance for Minority Programs at ASU, the NSF- funded curriculum development grant in the Synthesis and Processing of Materials, and the NSF/University/State Center for Low Power Electronics. ***