Operational Methods in Semiconductor Manufacturing: Wafer Fab Operations: Modeling, Analysis and Design

9713465库马尔这笔赠款提供资金，用于开发优化半导体晶片制造设施的设计和运营的方法。将研究与业绩评价有关的描述性问题，以及与日程安排和规划有关的规范性问题。性能评估研究的目标是开发确定工艺时间变量、发布策略、调度策略、热点批次、设备故障、产品组合和集群工具对工厂周期时间性能的影响的方法。在调度方面，目标是设计和分析策略，以便在设备故障、安装时间限制、批处理考虑因素和操作员可用性限制的情况下，做出关于何时将新的晶片批次释放到工厂，以及如何在存在设备故障、安装时间限制、批量考虑和操作员可用性限制的情况下调度可再入生产线中的大量工位的实时决策。在规划方面，目标是研究产量学习、随时间的设备利用率、随时间增加设备的影响、提升和非静态行为等问题。此外，还将研究在面临需求不确定性的情况下随着时间的推移管理资本支出的问题。如果成功，这项研究的结果将有助于改进半导体制造设施的设计和运营。它们将为大型制造设施在建成前的性能预测提供方法。它们还将提供有效地调度昂贵的加工厂的复杂操作的方法，以改善它们的周期性能。因此，研究工作将有助于理解如何设计和操作大型晶片制造设施。

9713465 Kumar This grant provides funding for the development of methods for optimizing the design and operation of semiconductor wafer fabrication facilities. Descriptive issues concerning performance evaluation, as well as prescriptive issues concerning scheduling and planning will be studied. The goal of the research on performance evaluation is to develop methodologies for determining the impact of process time variabilities, release policies, scheduling policies, hot lots, equipment failures, product mix, and cluster tools on the cycle-time performance of the plant. In the area of scheduling, the goal is to design and analyze policies for making real-time decisions concerning when to release new wafer lots into the plant, and how to schedule the large numbers of stations in re-entrant fabrication lines in the presence of equipment failures, set-up time constraints, batching considerations, and operator availability constraints. In the area of planning, the goal is to study the issues of yield learning, equipment utilization over time, effects of adding equipment over time, ramp-up, and non-stationary behavior. Also, problems of managing capital outlays over time in the face of demand uncertainty will be studied. If successful, the results of this research will lead to improvements in the design and operation of semiconductor fabrication facilities. They will provide methods for the prediction of the performance of large fabrication facilities before they are built. They will also provide methods for efficiently scheduling the complex operations of expensive fabrication plants so as to improve their cycle-time performance. The researched work will thus contribute to the understanding of how to design and operate large wafer fabrication facilities.