Basic Reseaarch on the Dependence of Structure and Nano- mechanical Properties of Ultra-thin Protective Overcoats on Processing Conditions

CMS 9734907PI：K. KomvopoulosUniv of CA Berkeley摘要基础研究是在等离子体沉积条件下超薄碳涂层的组成、微观结构、形貌和纳米机械性能以及这些膜的纳米摩擦学性能的依赖性上进行的。研究的工艺参数，实验方法的析因设计的基础上，是射频功率，腔室压力，衬底偏压，和沉积速率。在这项研究中开发的相关性导致最佳的薄膜加工参数的识别，并提供洞察微观尺度的摩擦现象。研究结果有助于增强高密度磁记录等前沿技术的减摩、耐磨界面设计的技术基础。

CMS 9734907PI: K. KomvopoulosUniv of CA BerkeleyABSTRACTBasic research is performed on the dependence of the composition, microstructure, topography, and nano-mechanical properties of ultra-thin carbon overcoats on plasma deposition conditions and the nano-tribological properties of these films. The processing parameters studied, based on a factorial design of experiments approach, are the RF power, chamber pressure, substrate bias voltage, and deposition rate. Correlations developed in this research lead to the identification of optimum film processing parameters and provide insight into micro-scale tribophenomena. The results help to enhance the technological basis for the design of anti-friction, wear-resistant interfaces of leading-edge technologies such as high-density magnetic recording.