Development of a Multi-Spectral Fluid/Solid Micro-Motion Measurement System

我们提出了一种高速成像系统的发展，能够测量固体表面和微机械系统内的流体元素的运动。 该系统的独特之处在于，它将能够在近红外线下工作--这种能力使它能够穿透硅衬底，进入复杂的微机械设备的内室。 这将使第一次，高速测量的运动学和动力学的微机械设备和themotion的流体内部复杂的微机械系统。 该仪器的应用将包括测量微型设备的操作（阀门，泵，加速度计，陀螺仪等），直接测量微观几何形状内的流体行为，其中可见的成像是不可能的，由于干预硅表面。仪器的发展，包括组装定制硬件红外显微镜和照明与激光操作结合非线性光参量振荡器（OPO）。 这些产生两个非常短的激光脉冲（每个4 ns）。 所得到的图像由一对近红外焦平面阵列捕获，并下载到数字信号处理板（DSP）进行实时处理并在主机PC上显示。 定制的信号处理软件将支持三种操作模式：固体运动测量、固体变形测量和流体运动测量。

We propose the development of a high-speed imaging system capable ofmeasuring the motion of both solid surfaces and fluid elements inside amicromachined system. The system is unique in that it will be capable ofoperating both in the near infrared - a capability that allows it to seethrough silicon substrates and into the inner chambers of complexmicromachined devices. This will enable, for the first time, high-speedmeasurements of the kinematics and dynamics of micromachined devices and themotion of fluids inside complex micromachined systems. Applications of thisinstrument will include measurement of micro device operation (valves,pumps, accelerometers, gyroscopes, etc), direct measurement of fluidbehavior inside micro-geometries where visible imaging is not possible dueto intervening silicon surfaces.The instrument development includes the assembly of custom hardware forinfrared microscopy and illumination with lasers operating in conjunctionwith nonlinear Opto-Parametric Oscillators (OPOs). These create two veryshort laser pulses (4 ns each). The resultant image is captured by a pairof near-IR focal plane arrays and downloaded to a Digital Signal ProcessingBoard (DSP) for real-time processing and display on a host PC. Customsignal processing software will enable three modes of operation: solidmotion measurement, solid deformation measurement and fluid motionmeasurement.