Enhanced Processing and Characterization Resources for Micro- and Nanostructures

该奖项来自康奈尔大学的主要研究仪器项目，支持国家纳米制造用户网络（NNUN）的仪器采购。NNUN由康奈尔大学、斯坦福大学、霍华德大学、宾夕法尼亚州立大学和霍华德大学组成，为来自全国各地的用户提供先进的纳米制造资源。在最近的一年中，NNUN为来自微电子、微力学、光学、生物、材料科学、化学和物理等领域的1500多名用户提供服务。现代化的设备是我们能够服务于这个多样化的用户群体的关键。该奖项包括升级关键NNUN设施的资金。根据该合同，CNF将购买激光模式发生器。这台仪器不仅对制造先进的掩模至关重要，而且对尺寸小到四分之一微米的直接激光制造也至关重要。霍华德大学将在其SIMS系统中安装先进的离子源，以提高其微量分析能力。根据该合同，宾夕法尼亚州立大学的设施将购买先进的场发射扫描电镜。当与另一个奖项的集成扫描隧道显微镜相结合时，将为NNUN用户提供先进的纳米级表征工具。UCSB将购买新的计算机控制系统来升级其JBX5电子束光刻工具，使其能够继续支持亚微米范围内的微加工。国家纳米制造用户网络（NNUN）由康奈尔大学、斯坦福大学、霍华德大学、宾夕法尼亚州立大学和霍华德大学的站点组成，为来自全国各地的用户提供先进的纳米制造资源。在最近的一年中，NNUN为来自微电子、微力学、光学、生物、材料科学、化学和物理等领域的1500多名用户提供服务。现代化的设备是NNUN能够服务于多样化用户群体的关键。该奖项来自主要研究仪器项目，包括升级康奈尔大学的掩膜制造设备，扩展宾夕法尼亚州立大学和霍华德大学的微分析能力，以及升级加州大学圣巴巴拉分校的电子束光刻设备。该设备对于使NNUN能够服务于指数级增长的用户，教师，学生，博士后和行业用户至关重要。

This award from the Major Research Instrumentation program to Cornell University supports instrument acquisition for the National Nanofabrication User Network (NNUN). The NNUN consists of sites at Cornell, Stanford, Howard, Penn State, and Howard University, provides advanced nanofabrication resources to users from around the country. In the most recent year, NNUN served over 1500 users from fields as diverse as microelectronics, micromechanics, optics, biology, materials science, chemistry, and physics. Modern equipment is key to our ability to serve this diverse user community. This award includes funds to upgrade critical NNUN facilities.Under this award, CNF will purchase a Laser Pattern Generator. This instrument is crucial not only for fabrication of advanced photomasks but also for direct laser fabrication at dimensions as small as a quarter of a micrometer. Howard University will install an advanced ion source to its SIMS system to increase its capability for microanalysis. Under this award, the facility at Penn State will purchase an advanced field emission SEM. When combined with an integrated scanning tunneling microscope from another award, an advanced nanoscale characterization tool will be made available to NNUN users. UCSB will purchase a new computer control system to upgrade its JBX5 electron beam lithography tool to allow it to continue to support microfabrication in the sub Micrometer range.The National Nanofabrication User Network (NNUN), consisting of sites at Cornell, Stanford, Howard, Penn State, and Howard University, provides advanced nanofabrication resources to users from around the country. In the most recent year, NNUN served over 1500 users from fields as diverse as microelectronics, micromechanics, optics, biology, materials science, chemistry, and physics. Modern equipment is key to NNUN's ability to serve this diverse user community. This award from the Major Research Instrumentation program includes funds to upgrade mask-making facilities at Cornell, to expand microanalysis capabilities at Penn State and Howard University, and to upgrade electron beam lithography facilities at UC Santa Barbara. This equipment is critical to enable NNUN to serve an exponentially growing number of users, faculty, students postdocs and users from industry.