Mixed-Domain Simulations, Reduced-Order Models and Circuits for Bio-MEMS

MEMS设计人员希望在一块芯片上实现更多功能，类似于在一块芯片上包含数十万个组件的VLSI技术，但他们目前受制于有限的生物MEMS设计工具。一种结构化的生物MEMS设计方法可以解决目前生物MEMS设计面临的许多挑战。本研究的目的是开发用于生物MEMS结构化设计的生物微机械的器件、降阶和电路建模的分析和设计工具。器件建模的目的是建立包含生物MEMS中所有重要微观效应的数学模型，开发快速高效的散点和混合区域技术用于生物流体器件的混合域分析。降阶建模的目的是用能够捕捉功能行为的低阶模型来表示设备。基于加权快照方法的低阶模型将被开发来捕捉在生物微机械中遇到的多个时间尺度。通过识别可能构成复杂片上生物微机械的基本构建块的几个生物流体组件，并为这些构建块开发降阶模型，将开发出用于设计大规模芯片上生物集成电路的电路模型。

MEMS designers would like more functionality on a chip, akin to the VLSI technology comprising of hundreds of thousands of components on a chip, but they are currently handicapped with the limited design tools for Bio-MEMS design. A structured design methodology for Bio-MEMS can address many of the challenges currently facing Bio-MEMS design. The objective of this research is to develop analysis and design tools for device, reduced-order, and circuit modeling of Bio-MEMS for structured design of Bio-MEMS.The objectives of device modeling are to develop mathematical models to include all significant microscopic effects in Bio-MEMS, develop fast and efficient scattered point and mixed-regime techniques for mixed-domain analysis of bio-fluidic devices. The objective of reduced-order modeling is to represent the device by a low-order model that can capture the functional behavior. Low-order models based on a weighted snap shot approach will be developed to capture multiple time scales encountered in Bio-MEMS. By identifying several Bio-fluidic components, that could form the basic building blocks for complex Bio-MEMS on a chip, and developing reduced-order models for these building blocks, circuit models will be developed to design large-scale biointegrated circuits on a chip.