NER: Device and Circuit Modeling of Integrated Nanoelectromechanical Systems (NEMS)

摘要：本研究的目的是开发用于集成纳米机电系统（NEMS）的器件建模工具，提取紧凑模型，并开发基于多现象的电路仿真工具，该工具可以对NEMS以及集成纳米系统的其他组件进行建模。器件建模研究将侧重于三个混合能域的自一致分析，即静电、机械和范德华能域。静电学的层次物理理论将与范德华相互作用和纳米尺度力学理论相结合。器件建模工作的最终目标是提取参数化的降阶或紧凑模型，这些模型可以用作集成纳米机电系统电路仿真的输入模型。电路建模研究将侧重于增强基于spice的仿真框架，使其能够支持基于cad的纳米系统概念化、设计探索和合成的多物理场和多现象。具体来说，电路建模工作将集中在NEMS的非电气元件的电路表示以及NEMS的有效时间和频率相关仿真的开发上。

DATE: May 15, 2004PROPOSAL NO: 0403020INSTITUTION: U of Ill Urbana-ChampaignPRINCIPAL INVESTIGATOR: Aluru , NTITLE: NER: Device and Circuit Modeling of Integrated Nano-electromechanical Systems (NEMS)Abstract:The objective of this research is to develop device modeling tools for NEMS, to extract compact models and to develop multi-phenomena based circuit simulation tools that can model NEMS along with other components of integrated nanosystems. The device modeling research will focus on self-consistent analysis of three mixed-energy domains - namely, electrostatics, mechanical and van der Waals energy domains. Hierarchical physical theories for electrostatics will be combined with van der Waals interactions and nanometer scale mechanical theories. The final goal of the device modeling effort is to extract parameterized reduced-order or compact models that can be used as input models for circuit simulation of integrated nano electromechanical systems. The circuit modeling research will focus on the enhancement of the SPICE-based simulation framework with the capability to support multi-physics and multi-phenomena for CAD-based conceptualization, design exploration and synthesis of nanosystems. Specifically, the circuit modeling effort will focus on the circuit representation of the non-electrical components of NEMS as well as on the development of efficient time- and frequency-dependent simulation of NEMS.