NER: Device and Circuit Modeling of Integrated Nanoelectromechanical Systems (NEMS)

日期：2008年12月15日2004年5月15日提案号：0403020机构：伊利诺伊大学厄巴纳-香槟分校校长：Aluru，NTITLE：NER：集成纳米机电系统（NEMS）的设备和电路建模摘要：本研究的目的是开发NEMS的设备建模工具，提取紧凑的模型和开发多现象为基础的电路仿真工具，可以建模NEMS沿着与其他组件的集成纳米系统。器件建模研究将集中在三个混合能量域的自洽分析-即，静电，机械和货车范德瓦尔斯能量域。静电学的分级物理理论将与货车德瓦耳斯相互作用和纳米尺度的力学理论相结合。器件建模工作的最终目标是提取参数化的降阶或紧凑模型，这些模型可用作集成纳米机电系统的电路仿真的输入模型。电路建模研究将侧重于增强基于SPICE的仿真框架，使其能够支持基于CAD的概念化、设计探索和纳米系统合成的多物理和多现象。具体来说，电路建模工作将集中在NEMS的非电气组件的电路表示，以及对有效的时间和频率依赖的NEMS仿真的发展。

DATE: May 15, 2004PROPOSAL NO: 0403020INSTITUTION: U of Ill Urbana-ChampaignPRINCIPAL INVESTIGATOR: Aluru , NTITLE: NER: Device and Circuit Modeling of Integrated Nano-electromechanical Systems (NEMS)Abstract:The objective of this research is to develop device modeling tools for NEMS, to extract compact models and to develop multi-phenomena based circuit simulation tools that can model NEMS along with other components of integrated nanosystems. The device modeling research will focus on self-consistent analysis of three mixed-energy domains - namely, electrostatics, mechanical and van der Waals energy domains. Hierarchical physical theories for electrostatics will be combined with van der Waals interactions and nanometer scale mechanical theories. The final goal of the device modeling effort is to extract parameterized reduced-order or compact models that can be used as input models for circuit simulation of integrated nano electromechanical systems. The circuit modeling research will focus on the enhancement of the SPICE-based simulation framework with the capability to support multi-physics and multi-phenomena for CAD-based conceptualization, design exploration and synthesis of nanosystems. Specifically, the circuit modeling effort will focus on the circuit representation of the non-electrical components of NEMS as well as on the development of efficient time- and frequency-dependent simulation of NEMS.