Development of a General Use Nanomechanical Imaging System Based on Ultrasonic and Heterodyne Force Microscopy

这笔赠款支持奥尔巴尼州立大学基于超声波和外差力显微镜的无损、通用纳米机械成像系统(GNIS)的开发。该分析系统将能够以纳米长度空间分辨率定量测绘/成像各种纳米尺度材料和器件结构的弹性(静态)和粘弹性(动态)响应。通过将传统SPM的纳米空间分辨率与声学或超声显微镜的弹性成像能力相结合，该仪器将填补目前在定量表征纳米系统静态和动态力学方面的空白。在实验室使用中，该仪器将以类似于商用扫描探针显微镜(SPM)的方式运行，将获得样品弹性模数和粘弹性响应频率的定量、数字、栅格、纳米级图像。该仪器的应用很多，代表了纳米电子、微系统(MEMS)、集成电路(IC)制造和纳米技术等广泛领域的迫切需要。研究领域包括(1)IC和MEMS制造中材料/器件的机械均匀性和工艺诱导的机械修改；(2)MEMS和IC结构中随深度变化的弹性/粘弹性截面分析；(3)纳米管结构的弹性/粘弹性成像及其与电性能的关系；(4)金属纳米线的纳米机械成像；(5)有机光致抗蚀剂薄膜中的纳米机械缺陷的研究。GNIS开发计划将大大有助于实现奥尔巴尼大学和我们的研究/教育合作伙伴的研究/教育目标。它将提供独特的纳米机械表征系统，以推进我们的基础和应用纳米技术研究项目(见项目部分)，并补充大学新成立的纳米科学和纳米工程学院(SNN)的纳米科学课程开发。GNIS的成功开发还将增强奥尔巴尼大学新成立的SNN吸引纳米科学和纳米技术领域学生的能力。SNN拥有这样一个独特的系统，将加强我们在纳米机械和纳米设备可靠性领域招聘新科学家和教师的努力。

This grant supports the development of a nondestructive, general-use nanomechanical imaging system (GNIS) based on ultrasonic and heterodyne force microscopy at SUNY at Albany. This analytical system will be capable of quantitatively mapping/imaging the elastic (static) and viscoelastic (dynamic) response of a variety of nanoscale materials and device structures with nanometer length spatial resolution. By combining the nanometer spatial resolution of conventional SPMs with the elastic imaging capabilities of acoustic or ultrasonic microscopes, this instrument will fill a current void in the quantitative characterization of the static and dynamic mechanics of nanoscale systems. In laboratory use, this instrument will operate in a manner analogous to commercially available scanning probe microscopes (SPMs) in that quantitative, digital, rastered, nanometer scale images will be obtained of sample elastic modulus and viscoelastic response frequency. Applications for this instrument are numerous and represent areas of critical need in a broad range of fields including nanoelectronics, microsystems (MEMS), integrated circuit (IC) fabrication and nanotechnology. Areas of research include (1) the mechanical uniformity and process-induced mechanical modification of materials/devices in IC and MEMS fabrication; (2) cross-sectional analysis for characterization of depth-dependent modulus variation in MEMS and IC structures; (3) elastic/viscoelastic imaging of nanotube structures and correlation with electrical performance; (4) nanomechanical imaging of metallic nanowires; and (5) investigation of nanomechanical defects in organic photoresist films. The GNIS development program will significantly contribute to achieving the research/educational goals of the University at Albany and our research/education partners. It will provide a unique nanomechanical characterization system to advance our fundamental and applied nanotechnology research projects (see projects section) and also complement nanoscience curriculum development in the University's newly formed School of Nanosciences and Nanoengineering (SNN). The successful development of GNIS will also enhance the ability of the University at Albany's newly formed SNN to attract both research programs and, consequently, students in the fields of nanoscience and nanotechnology. The presence of such a unique system at the SNN will strengthen our recruitment efforts for new scientists and faculty in the fields of nanomechanics and nanoscale device reliability.