MRI: Acquistion of Dual Beam FIB/SEM for Nanofabrication

[0421542] scherer2 .该仪器是一种双光束聚焦离子束扫描电子显微镜（FIB/SEM）系统，该研究小组打算用它来研究纳米尺度上的电磁现象。所涉及的研究“团队”包括三个协作要素。加州理工学院将发挥主导作用，喷气推进实验室将提供补充输入，FIB/SEM供应商（即FEI公司）不仅将提供基本硬件，还将交互式地协助加州理工学院的学生和教师进行软件优化。

0421543SchererThis proposed instrumentation acquisition is that of a dual-beam focused ion beam scanning electron microscope (FIB/SEM) system, with which the involved research team intends to investigate electromagnetic phenomena at the nanometer scale. The involved research 'team' includes three collaborative elements. CalTech will take the lead, JPL will provide supplemental input, and the FIB/SEM vendor (i.e., FEI Inc.) will not only furnish the basic hardware but will interactively assist CalTech students and faculty in their efforts with software optimization.