Microfabrication and Manufacture of 3C-SiC MEMS Pressures Sensors for Harsh Environments

该项目的研究目标是对一种新型的碳化硅基高温MEMS压力传感器的微加工和制造方案有一个基本的了解。该方法包括利用短脉冲激光封装集成压阻式应变计和温度补偿的微机械3C-SiC压力传感器芯片。此外，原型传感器将通过将传感器芯片与新型高温触头、焊盘和封装材料以及适用于在600至800摄氏度和20至1000磅/平方英寸的压力范围内直接使用的电气互连技术相结合来构建。研究将创造独特的压力传感器，方法是在大范围内形成厚度精确控制的膜片；开发重复性高的传感元件和衬垫；坚固的包装；以及大批量生产。该项目的成功将加速单晶3C-碳化硅的理解和应用，这是一种在恶劣和恶劣环境下用于MEMS和微电子设备的重要半导体。该项目的社会贡献将包括提高能源效率和绿色环境。工业上的好处是公用事业发电厂的监测和控制系统、工业过程控制、汽车动力总成控制、石油和天然气钻探的能源勘探以及燃料电池的能耗和成本更低。该计划将通过促进参与者的多学科教学和研究培训，并通过建立两个世界级的爱荷华州立大学微型制造中心来加强大学的基础设施，从而对工程教育产生影响。该计划将吸引妇女、少数族裔学生和高中教师参与；改进机械、材料和电气工程课程；并通过期刊和会议向科学界传播研究成果。

The research objective of the project is to gain a fundamental understanding of a novel microfabrication and manufacture scheme for SiC-based, high-temperature MEMS pressure sensors. The approach consists of utilizing short-pulsed lasers to bulk micromachine 3C-SiC pressure sensor chips with an integrated piezoresistive strain gauge and temperature compensation. In addition, prototype sensors will be built by integrating the sensor chips with novel high temperature contact, bond pad and packaging materials, and electrical interconnect technology suitable for direct use in the temperature range 600C to 800C and in the pressure range 20 psi to 1000 psi. Research will create unique pressure sensors by forming diaphragms with precisely controlled thickness over large areas; developing sensing elements and pads with high reproducibility; robust packaging; and high-volume production. The success of this project will accelerate the understanding and applications of single crystalline 3C-SiC, an important semiconductor for both MEMS and microelectronic devices in hostile and harsh environments. The societal contributions of the project will include improved energy efficiency and green environment. The industrial benefits are lower power consumption and cost in monitoring and controlling systems for utility power plants, industrial process controls, automotive power train control, energy exploration in oil and gas drilling, and fuel cells. The program will have impact in engineering education by promoting multidisciplinary teaching and research training of participants and enhancing the infrastructure at the university by contributing towards two world-class Iowa State University centers in micro-manufacturing. The program will engage the participation of women, and minority students and high-school teachers; improve mechanical, materials and electrical engineering curricula; and disseminate the research results to the scientific community through journals and conferences.