Large-area Chemical, Biological, and Materials NanoManufacturing

这项研究的重点是开发一个简单而廉价的平台，在晶片大小的区域上图案化软硬纳米材料。这项工作的大部分利用软纳米光刻和自由浮动和灵活的金掩模穿孔与纳米孔图案化学，生物和无机材料在纳米级水平的进步。这些纳米制造方法可以在几平方英寸上并行地实现亚100 nm的图案，其中亚100 nm的间隔。多尺度和纳米级图案仅由母版确定。这一新的软纳米制造平台的成果将推动科学前景，如多路复用化学和生物传感架构和独特的混合等离子体纳米材料直接集成与基于芯片的处理。这项工作的教育和推广目标侧重于将纳米制造研究融入课堂。在国内，将开展三项工作：（1）由NSF-本科教育纳米技术奖资助的新生和大学生纳米图案研究课程（http：//www.nanoed.org/courses/nano_experiments_menu.html上的实验模块）;（2）向作为NSF-国家纳米科学与工程学习和教学中心的一部分的自组装/纳米图案化工作组提供内容;及（3）举办有关纳米技术的公开讲座，并进行现场示范。在国际上，将继续主导纳米技术实践讲习班，如非洲材料研究学会的讲习班（2007年）。在这里，教授和学生们学习了基于CD和软光刻的台式纳米图案化实验。

This research focuses on the development of a simple and inexpensive platform to pattern soft and hard nanoscale materials over wafer-sized areas. The majority of this work exploits advances in soft nanolithography and free-floating and flexible gold masks perforated with nanoholes to pattern chemical, biological, and inorganic materials at the nanoscale level. These nanomanufacturing methods can achieve, in parallel, sub-100 nm patterns with sub-100 nm separations over several square inches. The multi-scale and nanoscale patterns are simply determined by the master. The outcomes of this new soft nanomanufacturing platform will drive scientific prospects, such as architectures for multiplexed chemical and biological sensing and unique hybrid plasmonic nanomaterials for direct integration with chip-based processing.The educational and outreach goals of this work focus on integrating nanofabrication research into the classroom. Domestically, three efforts will be carried out: (1) research-based courses on nanopatterning for freshmen and sophomores sponsored by an NSF-Nanotechnology in Undergraduate Education award (lab modules for the experiments at http://www.nanoed.org/courses/nano_experiments_menu.html); (2) contributing content to a self-assembly/nanopatterning working group as part of the NSF-National Center for Learning and Teaching in Nanoscale Science and Engineering; and (3) delivery of public lectures on nanotechnology that also involve live demonstrations. Internationally, the leading of hands-on nanotechnology workshops such as the one at the African Materials Research Society (2007) will continue. Here, professors and students were taught benchtop nanopatterning experiments based on CDs and soft lithography.