SGER: DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVE RESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIA

液体介质高Q高频硅电容振荡器的设计与优化该方案旨在设计、制造和表征能够在液体中高Q工作的体模电容式硅谐振器，用于高分辨率无标记生化检测和分析。目标是展示10-200 MHz频率范围内谐振器在去离子水中的品质因数高达1000。智能优点：尽管硅谐振器技术最近取得了进展，人们对高精度质量传感器等设备的适用性也有了猜测，但对于此类设备的实际传感应用，还没有可行的设计或架构被证明。特别是，电容式微谐振器在具有可接受的高品质因数的液体中的工作仍然是一个悬而未决的问题。这项工作将开发和展示新的设计概念和制造方法，以最大限度地减少由周围液体造成的粘性阻尼。所提出的部分封装谐振器将在水溶液介质中进行设计、制造和表征。更广泛的影响建议谐振器的成功开发将为高灵敏度无标记生化传感器阵列的实施铺平道路，在生物、医学和健康科学中有着广泛的应用。建议活动的预期结果将在国家科学基金会国家科学基金资助下推动Pi？S正在进行的讲座和实验室课程开发活动。在这个项目下，PI将为本科生提供研究助理。对本科生的经济支持将由丹佛大学通过合作伙伴奖学金(PINS)计划提供。在挑选本科生研究助理时，将优先考虑来自少数群体和代表性不足群体的学生

DESIGN AND OPTIMIZATION OF HIGH FREQUENCY SILICON CAPACITIVERESONATORS FOR HIGH-Q OPERATION IN LIQUID MEDIAABSTRACT1. ObjectivesThis proposal is aimed at the design, fabrication, and characterization of bulk-mode capacitivesilicon resonators capable of high-Q operation in liquid for high-resolution label-free biochemicaldetection and analysis. The goal is to demonstrate quality factors as high as 1000 in DI water forresonators in the 10-200MHz frequency range.2. Intellectual Merit:Despite recent developments in the silicon resonator technologies and speculations on thesuitability of such devices as high-precision mass sensors, no viable design or architecture forpractical sensory applications has been demonstrated for such devices. In particular, operation ofcapacitive micro-resonators in liquid with an acceptably high quality factor remains an openproblem. This effort will develop and demonstrate new design concepts and fabricationapproaches for minimization of viscous damping caused by the surrounding liquid. The proposedpartially encapsulated resonators will be designed, fabricated and characterized in aqueous liquidmedia.3. Broader ImpactSuccessful development of the proposed resonators will pave the way towards implementation ofhighly sensitive label-free biochemical sensor arrays with numerous applications in biology,medicine and health sciences.The expected outcomes of the proposed activities will fuel the PI?s ongoing lecture and lab coursedevelopment activities under the NSF NUE grant. The PI will have research assistantshipopenings for undergraduate students under this project. The financial support for theundergraduate students will be provided by the University of Denver through the Partners inScholarship (PINS) program. In selection of the undergraduate research assistants priority will begiven to students from the minority and under-represented groups