A Novel Multifunctional SPM Probe with Modular Quick-Change Tips for Fully Automated Probe-Based Nanomanufacturing

这项研究的目标是通过设计、制造和测试一种具有自动交换探头尖端(工具)能力的新型有源悬臂式探头来解决基于探头的纳米制造的吞吐量、重复性、可扩展性和有限功能等关键问题。基于探头的制造实现了无与伦比的空间/特征分辨率，以及组装和图案化混合(无机和有机)设备架构的能力。然而，探针针尖的实际纳米制造受到吞吐量、针尖磨损、针尖化学交叉污染和可扩展性等问题的限制，所有这些都降低了基于探针的制造的质量、可靠性和效率。这一独特的纳米探头系统通过实现探头尖端的自动互换解决了这些问题。通过简单地切换针尖，该探头可以用于纳米沉积、图案化、机械加工、计量和各种其他纳米制造工艺。位于SPM悬臂远端的是一个基于MEMS的电动微夹持器，其设计用于自动加载/卸载来自一组模块化探头尖端(工具)的尖端。使用一种新的控制方案来确定微夹持器和刀尖之间的相对位置，从而实现了自动化。这项研究将通过(1)基于SPM探针的有源悬臂梁的制造和(2)热接近传感的可行性研究来提供新的知识。该系统是宏尺度计算机数控(CNC)制造机床的纳米级模拟，具有全自动快速更换刀具的能力，无需操作员中断。提供全自动按需更换探头尖端的能力将提高基于探头的纳米制造的整体效率，允许多功能探头能力，并通过能够以有效方式补充/更换磨损或化学污染的尖端来提高工艺可靠性和质量。此外，这项研究计划将通过为本科生和研究生提供纳米技术方面的培训，通过招聘和支持研究生研究助理以及指导本科生研究人员来扩大代表不足的学生在工程学领域的参与，并通过独特的“VCU纳米日”活动扩展到大里士满地区的K-12学校。此外，拟议的研究将通过创建纳米级控制系统、传感和基于探针的纳米制造的教学模块来整合到机械工程课程中。

The goal of this research is to address the critical issues of throughput, repeatability, scalability, and limited functionality of probe-based nanofabrication by designing, fabricating, and testing a novel active cantilever probe with an automated ability to interchange probe tips (tools). Probe-based fabrication enables unmatched spatial/feature resolution and the ability to assemble and pattern hybrid (inorganic and organic) device architectures. However, practical nanofabrication with probe tips is limited by the issues of throughput, tip wear, tip chemical cross contamination, and scalability all of which act to decrease the quality, reliability, and efficiency of probe-based fabrication. This unique nano probe system addresses these issues by enabling automated interchanging of probe tips. By simply switching tips, the probe can be used for nano deposition, patterning, machining, metrology, and various other nanofabrication processes. Located at the distal end of an SPM cantilever is an electrically activated MEMS-based microgripper, which is designed to automatically load/unload tips from an array of modular probe tips (tools). Automation is achieved using a novel control scheme to determine the relative location between the microgripper and tool tip. This research will contribute new knowledge via feasibility studies of (1) active cantilevers for SPM probe-based fabrication and (2) thermal-proximity sensing. This system is a nanoscale analog of macroscale computer numerical control (CNC) manufacturing machines that have the ability for fully-automated rapid tool changes without operator interruption. The ability to provide fully automated on-demand probe tip changes will improve the overall efficiency of probe-based nanofabrication, allow for multifunctional probe capabilities, and improve process reliability and quality by enabling the ability to replenish/replace worn or chemically fouled tips in an efficient manner. In addition, this research program will broaden participation of underrepresented students in engineering by providing training for undergraduate and graduate students in nanotechnology, participation of underrepresented students through recruitment and support of graduate research assistants and mentoring of undergraduate researchers, and outreach to K-12 schools in the greater Richmond area through a unique "Nano Day at VCU" event. Additionally, the proposed research will be integrated into the mechanical engineering curriculum by creating teaching modules in nanoscale control systems, sensing, and probe-based nanofabrication.