MRI: Acquisition of a Focused Ion Beam Instrument for Research and Education

凭借主要研究仪器（MRI）计划的这一奖项，印第安纳州大学化学系将获得聚焦离子束（FIB）仪器，用于开发和表征具有分子水平上定制和控制的特性的结构。 研究应用是强烈的跨学科跨越主题从化学合成到物理性质测量到生物自组装。 更具体地说，FIB将影响以下研究活动：（1）用于纳米光子力致动器的近场孔径阵列;（2）用于光强度映射和传感的纳米结构;（3）用于液相分离的纳米流体通道;（4）基于纳米孔的化学传感器;（5）纳米纤维和有机凝胶的结构分析;（6）计数和关联金纳米颗粒以研究表面增强拉曼散射（Sers）增强;（7）表征结构控制材料;（8）低维纳米结构中的量子相变;（9）纳米受限液相系统的结构和动力学;（10）纳米电子学中超分子材料的表面接触;以及（11）用于低温TEM分析的切片样品。FIB仪器用于制造尺寸低于100 nm的结构和用于制备用于高分辨率透射电子显微镜的薄切片样品。该仪器由场发射扫描电子显微镜（FESEM）柱和液体镓聚焦离子束（FIB）柱组成，它们以“双束”模式一起操作。镓离子在离子柱中产生、加速和聚焦，撞击样品，烧蚀离子束焦点处的材料。实际上，该过程产生了具有高分辨率（低于100 nm）的研磨机，其可以用FESEM“真实的时间”进行监测。该仪器也是一个功能齐全的扫描电子显微镜时，没有聚焦离子束操作。 该系统将被集成到几个研究生课程，以及对微和纳米纤维技术的教程。教师用户很好地与现有的大学范围内的计划，目标是从代表性不足的群体增加参与整合。 本科生也将通过正在进行的实验室课程和独立的研究项目获得这种仪器。 纳米织物的概念将通过基于网络的演示广泛传播。

With this award from the Major Research Instrumentation (MRI) program, the Department of Chemistry at Indiana University will acquire a Focused Ion Beam (FIB) instrument for the development and characterization of structures with properties that are tailored and controlled at the molecular level. The research applications are strongly interdisciplinary spanning topics from chemical synthesis to physical property measurements to biological self-assembly. More specifically, the FIB will impact the following research activities: (1) near-field aperture arrays for nanophotonic force actuators; (2) nanostructures for light intensity mapping and sensing; (3) nanofluidic channels for liquid phase separations; (4) nanopore-based chemical sensors; (5) structural analysis of nanofibers and organogels; (6) counting and correlating gold nanoparticles to investigate surface enhanced Raman scattering (SERS) enhancement; (7) characterization of architecturally controlled materials; (8) quantum phase transitions in low-dimensional nanostructures; (9) structure and dynamics of nano-confined liquid-phase systems; (10) surface contacts for supramolecular materials in nano-electronics; and (11) sectioning samples for cryo-TEM analysis.A FIB instrument is used for fabricating structures with dimensions below 100 nm and for the preparation of thin section samples for high-resolution transmission electron microscopy. The instrument consists of a field emission scanning electron microscope (FESEM) column and a liquid gallium focused ion beam (FIB) column, which operate together in a "dual beam" mode. Gallium ions are produced, accelerated, and focused in the ion column, strike the sample, ablating material at the focus of the ion beam. The process, in effect, creates a mill with high (sub 100 nm) resolution that can be monitored in "real time" with the FESEM. The instrument is also a fully functional scanning electron microscope when operated without the focused ion beam. The system will be integrated into several graduate courses as well as a tutorial on micro and nanofabrication techniques. The faculty users are well integrated with existing university wide programs that target increased participation from underrepresented groups. Undergraduates will also have access to this instrumentation through ongoing lab courses and independent research projects. The concepts of nanofabrication will be broadly disseminated via web based demos.