Ultra-precise electromagnetic linear guide

该项目的目标是为超精密高性能切削做出贡献，这将是全球首次使用高精度电磁线性滑块实现，该滑块可补偿铣削过程中的静态，动态和热误差。在第一个应用阶段，将设计、建造和探索电磁导轨。最感兴趣的是在纳米范围内的精度的磁制导的资格。为此，将探索用于增加测量精度和带宽、控制采样率和致动器动态的新方法。第二个应用阶段的重点在于研究补偿静态、动态和热引起的误差的方法。因此，滑动件将被致动以补偿任何线性或组装误差。除了减少设置和调整时间外，还可以补偿导轨和滑块的制造误差，鉴于在300 mm行程内500 nm偏差的线性要求，这将导致组件制造成本的显著降低。滑动件正交于引导方向的自由度还允许补偿支撑轴线的定位误差。当增加刀具主轴速度（从2,000 min-1到20,000 min-1）时，由于最小的残余不平衡，预计刀具的寄生振荡也会增加。这些将通过探索尽可能在纳米范围内的主动振动阻尼方法来抑制。

The objective of this proposed project is a contribution to ultra-precision high-performance- cutting which will be realized for the first time worldwide with the use of a high-precision electromagnetic linear slide, which compensates for static, dynamic and thermal errors during the milling process. The electromagnetic guide will be designed, built and explored in the first application period. Of prime interest is the qualification of the magnetic guidance for accuracies in the nanometer range. For this purpose, novel methods for increasing the measurement accuracy and bandwidth, the control sample rate and the dynamics of the actuators will be explored. The focus in the second application period lies in the investigation of methods for compensating static, dynamic and thermally caused errors. Thus, the slide will be actuated to compensate for any linearity or assembly errors. In addition to the reduction of set-up and adjustment times, compensating for manufacturing errors of the guide and the slide will also become possible, which will result in a significant cost reduction of component manufacturing in view of the linearity requirement of 500nm deviation over 300mm travel. The degrees of freedom of the slide orthogonal to the guide direction further allow compensate for positioning errors of the supporting axis. When increasing the tool spindle speed (from 2,000min-1 to 20,000min-1) also increased parasitic oscillations of the tool are expected due to minimal residual imbalances. These will be suppressed by the exploration of methods for active vibration damping in the nanometer range as far as possible.