Batch fabricated SiC micro milling tools for precision machining of copper-based materials

在这个项目中，机械制造工艺以及光刻和蚀刻工艺的组合将得到开发和根本性的研究，以便经济批量生产由碳化硅制成的微型铣刀。特别是光刻和蚀刻工艺的组合将使大量的微型铣削工具的制造在同时的单个步骤（批处理）。在项目开始时，微型刀具将使用机械加工步骤（切割策略）生产，以便首次分析不同几何细节对切割行为（结果）的影响。这些第一个演示工具的几何形状将在考虑到可制造性的情况下通过有针对性的批量工艺进行设计。切削质量和刀具磨损行为将使用两种铜材料上的迭代测试来表征。将获得的研究结果纳入后期批量生产的开发步骤中。然后，以与机械制造工具相同的方式表征通过组合光刻和蚀刻方法生产的微型铣削工具的切削行为和磨损，并在几个迭代步骤中进一步优化。基于这项研究，应该可以使用批量工艺大量生产SiC微工具，使这种有前途的材料有资格用于微铣削工具。

Within this project both, the mechanical manufacturing processes as well the combination of lithography and etch processes will be developed and fundamentally investigated for allowing economical batch production of micro milling tools made of silicon carbide. Especially the combination of lithography and etching processes will enable the manufacturing of large quantities of micro milling tools in simultaneous single steps (batch process). The micro cutters at the beginning of the project will be produced using mechanical processing steps (dicing strategies) to allow the first analyses of the impact of different geometry details on the cutting behavior (result). The geometry of these first demonstrator tools will be designed under consideration of the manufacturability by an aimed batch process. Cutting quality and tool wear behavior will be characterized using iterative tests on two copper materials. The acquired research findings are incorporated into the development steps of the later batch manufacturing. The micro milling tools produced by combining the lithographic and etching methods are then characterized in the same manner as the mechanically manufactured tools regarding their cutting behavior and wear, and further optimized in several iterative steps. Based on this research, it should be made possible to produce SiC micro tools in large quantities using a batch process, qualifying this promising material for micro milling tooling.