Behavior of hydrogen in alloy films and their structures

研究了氢在金属合金膜和多层膜中的行为，以及氢化合金膜的结构、电子和热性能。这些薄膜是用高真空蒸发设备制备的，该设备是由科学研究补助金自行设计和制造的。主要研究内容如下：研究了Pd/Ti和Ni/Ti双层膜和多层膜的互扩散和固态非晶化现象。在这些薄膜中，组分原子在250-350℃左右通过界面发生互扩散或相互混合，从而在整个薄膜中诱导亚稳态相。用掠入射X射线衍射和横截面电子显微镜观察到了非晶相的形成，用俄歇电子深度剖析揭示了非晶相的扩散动力学。当在多层膜中引入氢时，在Ti层中形成了热稳定的Ti二氢化合物，并显著地阻碍和抑制了非晶相的形成。对固态非晶化和氢化效应进行了热力学分析。

Studies have been made of the behavior of hydrogen in metallic alloy films and multilayrs and of the structure and electronic and thermal properties of hydrgenated alloy films. These films were prepared using a high-vacuum evaporation apparatus which had been self-designed and manufactured with the Grant-in-Aid for Scientific Research. The following researches have been Chiefly performed :Interdiffusion and solid-state amorphization phenomena in bilayred and multilayred Pd/Ti and Ni/Ti films have been investigated. In these films, interdiffusion or intermixing of component atoms takes place at around 250-350'C via the interfaces, which induces metastable phases througehout the films. Amorphous phase formations have been observed by grazing-incidence X-ray diffraction and cross-sectional transmission electron microscopy, and the kinetics of the indterdiffusion has been revealed by Auger-electon depth profiling. When hydrogen is introduced in the multilayred films, Ti-dihydrides are formed in the Ti layrs, which are thermally stable and impedes and suppresses the amorphous-phase formation significantly. A thermodynamic analysis for the solid-state amorphization and the effect of hydriding has been made.