Evaluation of Lapping Mechanism by Visualization of Abrasive Grain

磨粒运动的可视化评价对于研磨加工机理的评价具有十分重要的意义，因为研磨加工是通过研磨液中磨粒在研磨液中的运动来实现的，研磨液在研磨过程中流动于研磨与被研磨之间。磨粒的运动分为研磨板上凹槽内的运动和研磨表面上的运动。本文研究了磨粒在凹槽中的运动过程，利用所提出的可视化技术对方形凹槽研磨板上凹槽中磨粒的运动进行了二维再现。观察结果表明，方槽内的磨粒沿槽壁运动。磨粒在方槽中的运动过程取决于磨粒在槽中的流动速度。根据磨粒在凹槽中的运动图像，计算出磨粒的运动速度。另一方面，用有限元分析方法计算了方槽搭接平板上的二维流动。分析得到的磨粒在凹槽中的速度分布与通过对磨粒在凹槽中的运动进行可视化得到的速度近似相等。根据分析和可视化结果，研究了凹槽对研磨机理的影响以及磨粒在凹槽中运动的最适工艺。

The evaluation of the movement of abrasive grain by the technique of the visualization is extremely significant for the evaluation of the machining mechanism in the lapping because the workpiece is machined by the movement of the abrasive grain in lapping fluid which flow between lap and workpieces. Also, the movement of the abrasive grain is divided into the movement in the groove on a lapping plate and a movement on the surface of lap. The movement process of abrasive grain in the groove is investigated in this study.The movement of abrasive grain in groove on a lapping plate with square groove is two-dimensionally reproduced using the proposed technique of visualization. The observation result shows that abrasive grain inflowing in square groove moves along the wall of the groove. The movement process of abrasive grain in square groove depends on the velocity of abrasive grain inflowing in groove. Also, the velocity of abrasive grain is calculated by the images of movement of abrasive grain in the groove. On the other hand, the the two-dimensional flow on lapping plate with square groove is estimated by finite element analysis. The analyzed velocity distribution of abrasive grain in groove is approximately equal to the velocity which is obtained by the visualization of the movement of abrasive grain in the groove. Also, the effect of the groove on lapping mechanism and the most suitable process of the movement of abrasive grain in the groove are investigated from the analysis and visualization results.