Study on Multi-scale Nano-measurement of Microparts using Optically Oscillated Microprobe

基于纳米三坐标测量机（cmm）的概念，建立微部件纳米级精度评价技术的研究综述如下：单光束梯度力维持空气中光学振荡的微探针。引入PSD （position sensing detector）作为振荡检测器，提出了位置传感方法。阻尼效应的变化是由探针球体表面与试样表面之间的薄层空气引起的。随着试样表面附近阻尼效应的变化，相位延迟也随之增大。因此，探头根据响应幅度的减小和相位延迟的增加来检测位置。为了验证振动探测方法的有效性，采用直径为8 μm的探测球，对圆晶硅片边缘进行横向探测，测量了振幅和相位延迟等振动条件。测量结果表明，所提出的探测技术可用于检测横向位置，实际分辨率小于23 nm，重复性为13.7 nm。利用氦氖激光波长可溯源到标准长度的外差激光干涉仪，对三维坐标系测量平台系统的运动精度进行了评价。验证了定位分辨率为5 nm、失动精度优于16 nm的平台系统对建立纳米三坐标测量系统的实用性。为了估计所研制的纳米三坐标测量系统的总不确定度，进行了三维形状测量。对直径为168±8.5 μm的标准微玻璃球进行了测量。评估直径为162.9 μm。这表明该测量系统可以有效地实现纳米级精度的微形状测量。

Investigations to establish assessment technologies for nanometer order accuracy of a micropart based on the concept of the nano-CMM (Coordinate Measuring Machine) are summarized as follows ;1.The single-beam gradient-force sustains an optically oscillating microprobe in air. The position sensing method is proposed by introducing a PSD (Position Sensing detector) as an oscillation detector. The change of the damping effect is brought by the thin layer of air between the probe sphere surface and the specimen's surface. The phase delay increases also according to changing of the damping effect close to the specimen's surface. So, the probe detects a position based on the response amplitude reduction together with the phase delay increase.2.To verify the validity of the vibrational probing method, the vibrating conditions such as the amplitude and the phase delay are measured by lateral probing of the as-cleaved silicon wafer edge using a probe sphere with diameter of 8 μm. The measurement results suggest that the proposed probing technique is useful for detecting a lateral position with the actual resolution of finer than 23 nm and the repeatability of 13.7 nm.3.Motion accuracy of the stage system for measuring 3D-coordinate system is evaluated by using a heterodyne laser interferometer of which the wave length of the He-Ne laser is traceable to the standard length. The usefulness of the stage system with positioning resolution of 5 nm and lost-motion accuracy of better than 16 nm is verified for establishing the nano-CMM system.4.In order to estimate total uncertainty for the developed nano-CMM system, three dimensional form measurement. of a standard micro glass sphere of 168 ±8.5 μm in diameter is performed. The diameter is evaluated 162.9 μm. This suggests that the measurement system is effective for micro-form measurement with an accuracy of nanometer order.