Study on a new three-dimensional laser micro-processing method using the difference in the permeation characteristic

近年来，制造业追求产品的附加值、低成本、高产品组合、适度重复生产以及与地球环境的和谐。激光加工与传统的机械加工和化学加工不同，激光加工是利用光的聚集性和非接触性来实现高速加工，并可实现高精度加工。此外，它对地球环境清洁，是一种节约加工的资源。因此，激光加工作为新材料的加工方法，即微细加工，被寄予厚望。但是，如果高成本的激光设备的性能和生产率没有得到证实，就有可能成为高成本。因此，在未来扩大激光加工的覆盖面和开发新的加工技术的尝试是很有意义的。 ...更多信息 如果三维的自由方向钻孔成为可能，则可以将新特征添加到产品中。本研究的目的是通过提出一种新的三维激光加工方法，对微晶玻璃进行高质量、高精度的自由方向三维钻孔加工，结果表明，已经开发了下面所示的方法，并实现了将其应用于三维钻孔。无裂纹加工方法需要在工件表面创建无裂纹加工，然后将熔体散布到空气中。实验结果表明，用YAG激光照射在涂有连续吸收激光的涂料的表面上，可以加工出无裂纹的钻孔.三维钻孔研究了钻孔的生长机理。通过观察和分析，发现这种生长是通过孔底的熔化层实现的。在此基础上，提出了一种新的无裂纹三维YAG激光加工方法。孔总是沿着激光入射方向钻孔，通过改变YAG激光入射方向，实现了无裂纹的三维钻孔.深孔钻削的发展本研究对深孔钻削施工方法进行了一些试验，以实现更深的高精度和高质量的三维钻孔。结果，通过从上下方向照射激光，解决了填充孔的问题.化学操作三维钻孔方法的开发实验结果表明，利用腐蚀方法可以从孔内逐渐去除粘附层和影响层，从而获得高质量的加工孔，使玻璃内部空间和螺旋加工成为可能。因此，减少生产工序和零件数量等各种效果是可以期待的。5.其他材料的应用本研究证实了这种三维钻孔方法可以应用于钠钙玻璃和碱性玻璃等。减

In recent years, the additional value of product, low costs, high product-mix and proper-repetitive production and a harmony with the earth environment are pursued in the manufacturing industry. The laser processing which is different from the conventional mechanical and chemical processing has been by the collection light and the non-contact-ability of the light in a high-speed and can realize high accuracy machining. Moreover, it is clean to the earth environment, as a kind of resource which can save machining. Therefore, the laser processing is highly expected as a method of the processing of new material, the micromachining.However, if that the performance and the productivity of the laser equipment with high cost become better than that in the past hasn't been proved the introduction into the production line may be of high cost. Therefore the attempts to expand the coverage of the laser processing in the future and the development of a new processing technology are much regained.I … More f the free direction drilling in 3-dimensional becomes possible, the new feature can be added to the product. This can expect a big effect as the new processing technology such as the reduction of the production process and the number of parts, the expansion of the coverage of the material.The purpose of this research is to apply a high quality and high accuracy 3- dimensional drilling to the free direction by proposing a newly 3-dimensional laser processing method to Glass-ceramics.As a result, that the method shown below has been developed and the application of which into 3-dimensional drilling was realized.1. The crack-free processing methodIt was necessary to create a crack-free processing on the surface of workpiece and then to scatter the melt into the air. According to the experimental results, it was found that a crack-free drilled hole could be processed when YAG laser beam irradiated on the surface with paints applied to absorb the laser beam continuously.2. The 3-dimensional drillingThe mechanism of growth of the drilled hole was examined. Through observation and analysis, it was found that the growth could be attained by melted layer on the bottom of a hole. Then, a new crack-free and 3-dimensional YAG laser processing method was developed and discussed. The holes are always drilled along the incident direction of laser, a crack-free and 3-dimensional drilled hole was realized by changing the YAG laser incident direction.3. Development of deep drillingThis research conducted some examination on the deep drilling method of construction to realize a deeper 3-dimensional drilling with high accuracy and quality. As a result, the problem of a filled hole was solved by irradiating a laser from the upper and lower direction.4. The development of the 3-dimensional drilling method using a chemical operationThe experimental results proved that the adhesion and affected layer can be removed gradually from inside the hole by using an etching, which can give a high quality processing hole.This way makes the inner space and the spiral processing become possible in the glass. Therefore, the various effects such as the reduction of the production process and the number of parts can be expected.5. The application to the other materialThis research confirmed that it is possible to apply this 3-dimensional drilling method to soda lime glass and alkaline glass and so on. Less