Development of molding technologies to create microstructures on glass and plastic and analysis of phenomena in the process.

(A)全息衍射栅、(B)免疫分析芯片、一次性隐形眼镜等作为试制候选材料，本研究综合考虑了新的转移工艺原理、转移材料或模具材料的均质性、模具的制作方法、工艺条件的优化等，针对全息衍射栅的注塑成型，研制了一种利用温度传感器和热流传感器监测塑料内部状态，并利用压电器件进行部分加压的设备。结果表明，利用该装置可以对塑料进行深度为150 nm的1微米倾斜衍射栅的注塑成型，并开发了利用牺牲层掩模转移到硬质材料上的工艺。塑料被涂在玻璃上，形状从模具转移到这个上面。接下来，快原子束进行各向异性刻蚀。那是Sho…此外，通过使塑料和玻璃的蚀刻速度相等，可以将原始模具的形状转移到玻璃上。在此基础上，开发了能够实时掌握注塑模腔内状态，并能根据模腔状态对模腔内状态进行主动局部控制的小型智能模具。在98x98x117 mm的智能模具中嵌入了两个局部击打模具型腔的小加热器、三个测量模具型腔局部热流密度的热流传感器、测量模具型腔内压力和容量的力传感器和位移传感器。结果表明，利用局部热流中心等技术，可将厚度为1 mm的箱形铸件和30x15×6 mm铸件的平面度从20微米提高到3微米。此外，为了实现对较窄区域的精确加热和冷却，进行了phi1.0 mm小型加热器和phi1.0 mm双管水路冷却器的实验研究。初步试验结果表明，采用APHI1.0 mm双管水路冷却器可局部降低模具型腔表面温度1℃。较少

(a) hologram diffraction grating, (b) immunoassay chip, c disposable contact lenses, etc. were set as the candidate for a trial production, this research considered synthetically the principle of a new transfer process^ Equality of the material of a transferred material or mold material, the fabrication method of mold, optimization of process conditions, etc. For injection molding of hologram diffraction gratings, the equipment which can monitor the state of internal plastics by the temperature sensor and the heat flux sensor and pressurize partially by the piezoelectric device was developed. It was shown that injection molding of the 1 micrometer pitched diffraction grating with a depth of 150nm could be carried out to plastics using this equipment.Moreover, the process which transfers to hard, material using a sacrifice layer mask was developed. Plastics are applied on glass and form is transferred from a mold to this. Next, the fast atom beam performs anisotropic etching. It was sho … More wn that the form of the original mold could be transferred on glass by equalizing the etching rate of plastics and glass. Furthermore, small intelligence mold which will grasp the state in the mold cavity of injection molding on real time and can control the conditions in a mold cavity actively and locally according to it was developed. Two small heaters which beat a mold cavity locally, three heat flux sensors which measure the local heat flux in a mold cavity, force sensor and displacement sensor which measure mold cavity internal pressure and capacity were embedded to the intelligence mold with a size of 98x98xll7mm. And it was shown that the flatness of 30xl5x6mm and a box type cast with a thickness of 1mm could be raised from 20 micrometers to 3 micrometers by partial heat flux central etc.Moreover, in order to heat and cool a narrower area at pinpoint, the phi1.0mm small heater and the phi1.0mm double pipe waterway cooler were made as an experiment and examined. It was shown that 1 degree C of mold cavity surface temperature could be locally lowered with aphi1.0mm double pipe waterway cooler as a result of the preliminary experiment. Less