Subfield adressing of ringshaped MEMS shutter arrays with polygonal structures

光学或基于干涉的显微镜需要空间可变的照明场景。然而，并不是所有的要求都可以同时满足，比如速度、温度范围、颜色中性或各种几何图案组合的可用性。MEMS快门阵列通过静电驱动实现动态光调制，同时满足所有这些要求。我们的研究旨在通过模拟、设计量身定制的子场寻址方案、技术实现阵列和实验表征来验证基于传输的MEMS调制器的概念。基于多边形区域的MEMS快门阵列的方法开发应确定速度，极端温度，用户接受度和子场组合数量以及用户接受度方面的限制。单个百叶窗将具有三角形或五角形。所有的直铰链的顺序排列成一个多边形。几个这样的快门环组成了一个子场环，它被细分为四个象限。象限是子字段，它们可以单独寻址。该项目旨在通过上下电极重叠的区域定义子场的特定形状。形状是面向未来的要求干涉显微镜。然而，从科学的角度来看，概念验证应该始终与其他应用保持一致。

Optical or interference-based microscopy requires illumination scenario which are spatially variable. However, not all requirements can be fulfilled at the same time such as speed, temperature range, color neutrality or availability of various combinations of geometric patterns. MEMS shutter arrays enable dynamic light modulation by electrostatic actuation, fulfilling all these demands, simultaneously. Our investigation aims for a proof-of-concept of transmission-based MEMS modulators by simulating, designing tailored subfield addressing schemes, implementing arrays technologically and characterizing experimentally. This methodology development of the polygon-area-based MEMS shutter arrays should identify the limits with respect to speed, extreme temperatures, user acceptance and number of subfield combinations and user acceptance.The single shutters will have triangular or pentagonal shape. The sequence of all straight hinges line up to a polygon. Several of these shutter rings comprise a subfield ring, which is subdivided into four quadrants. The quadrants are the subfields, which are addressable individually. The project aims for specific shapes of the subfields, which are defined by the area where the upper and lower electrodes overlap. The shapes are oriented to the future requirements of interference microscopy. However, the proof-of-concept should always stay aligned to other applications, from a scientific point of view.