Analysis and control of the fluids, interfaces of liquid-liquid and liquid-solid in microchannels

纳米/微流系统为化学和生物化学分析和合成开辟了新的可能性。对于纳米/微米流动系统的设计，考虑到电子器件和流动器件之间的对称性，大规模集成电路的设计思想是适用的。介绍了目前发展起来的具有微米级尺寸和纳升体积的纳/微流器件和元件。可忽略泄漏和死体积的微型阀被开发用于化学/生化应用。利用微尺度通道中的微流体行为，得到了微混合器和样品喷射器。利用高深宽比紫外光刻技术制作了沟道内微滤光片和电化学生物传感器。采用三维组装方法制作了植入PDMS微流池的三维金属电极。利用深RIE技术在硅衬底上制作了集成于芯片上的试剂注入微阀，实现了生物细胞观察微电池。生物分子分类微系统。还实现了利用溶胶-凝胶转移的水凝胶。

Nano/micro flow systems open up the new possibilities for chemical and biochemical analysis and synthesis. For the design of nano/micro flow systems LSI designing concepts is applicable considering the symmetries between the electric devices and the flow devices. Nano/micro flow devices and elements which have micro meter scale sizes and nano liter volumes developed so far are described. Microvalves of negligible leakage and dead volumes were developed for chemical/biochemical applications. Micro mixers and sample injectors were obtained by using microfluidic behaviors in micro scale channels. In channel micro filters and electrochemical biosensors were fabricated using high aspect ratio UV photolithographic technologies. 3D metal electrodes implanted PDMS microflow cell was fabricated using 3D assembly method. Biological cell observation micro cell integrated on chip microvalve for regent injection was fabricated on Si substrate using deep RIE. Biomolecules sorting microsystems were. also realized using sol-gel transfer of hydrogels.