Study on a Piezoelectric Angular Rate Sensor with High Stability

本研究的目的是研制一种高稳定性的压电角速度传感器。一些器件就是为了实现这样的传感器而设计的。(1)机电等效电路传感器的设计利用本文提出的等效电路可以设计压电角传感器的特性。该电路需要测量压电双谐振子的等效电路常数，并用来模拟传感器的零信号特性。(2)具有宽带频率特性的角速率传感器的结构在该结构中，电调谐电感平行地插入到有序压电双谐振子的两端。驱动侧的谐振频率不需要与检测侧的谐振频率同内，在宽带频率范围内传感器的灵敏度都是相等的。(3)对传感器的驱动和检测电路进行了分析，得出结论：压电双谐振子的零信号必须稳定且恒定在一定的驱动频率上，才能保证系统的稳定性。由于现在考虑的是一种器件，所以今后将采用这种尝试来设计一种角速度传感器。

The purpose of this research is to develop a piezoelectric angular rate sensor with high stability. Some devices are done to realize such a sensor. (1) Design by a Electro-mechanical Equivalent Circuit Sensor characteristics of a piezoelectric angular sensor can be designed by use of the equivalent circuit proposed here. This circuit needs measured equivalent circuit constants of a piezoelectric double-resonant vibrator, and are also utilized to simulate null signal characteristics of the sensor. (2) Construction of a Angular Rate Sensor with a Wideband Frequency Characteristic In the construction, electrical tuning inductors are inserted parallelly to the terminals of a ordinal piezoelectric double-resonant vibrator. The drive-side resonant frequency need not to coinside with the detection-side one, and the sensitivity of the sensor is all equal in a wideband frequency range. (3) The electronic circuits for drive and detection of a sensor are also considered.In conclusion, null signals in a piezoelectric double-resonant vibrator must be stable and constant at a drive frequency for stabrility. As a device is considered now, this attempt will be adopted to design a angular rate sensor from now on.