Development of Ultraprecision Intelligent Machine Tool

经过两年的研究，本研究的目标已成功实现。取得的主要研究成果如下：1.超精密切削加工误差对超精密切削加工误差的产生原因进行了分类。分析并阐明了主轴回转误差、主轴热变形和切削热热变形等主要原因的特点.智能控制所需机械元件的开发基于智能控制方案，开发了补偿各种误差所需的机械元件。它们分别是微型刀具定位系统、采用“行走驱动”的高刚度精密进给工作台和磁轴承支承的超精密主轴.应用timd'系列分析进行主轴位移补偿一种新的主轴误差预测和补偿系统。应用时间序列分析。实践证明，该方法提高了加工精度，系统性能稳定.学习控制补偿切削热引起的加工误差通过研究刀具温升与加工误差之间的关系，提出了一种新的预测和补偿切削热引起的加工误差的系统。结果表明，该方法能够补偿加工误差，实现高精度加工.

The objectives of this research have been successfully attained after two years of research. The major research results obtained are as follows ;1. Machining errors in ultraprecision cuttingThe causes of machining errors in ultraprecision cutting were classified, . and the characteristics of the main causes such a-s the rotational errors of spindles, the thermal deformation of spindles and the thermal deformation due to the cutting heat were analyzed and clarified.2. Development of machine elements required for intelligent controlMachine elements were developed which were required to compensate various errors based on the intelligent control scheme. They are micro tool positioning system, precision feed table with high stiffness by means of "Walking Drive" and ultraprecision spindle supported by magnetic bearings.3. Compensation for spindle displacement by applying timd'series analysisA new system to predict and compensate spindle errors. by applying time series analysis were developed. It was confirmed-that the machining accuracy was increased by the method and that the system performance was satisfactory.4. Learning control to compensate machining errors due to cutting heatA new system was developed to predict and compensate machining errors due to the cutting heat by Terning the relations between the temperature rise of tool and the machining-error. It was confirmed that the machining errors were compensated and high accuracy machining was realized.