Analysis of epilayr structures by high-resolution X-ray methods

用同步加速器X射线衍射仪测量了离子注入硅晶体的二维晶格畸变，其深度和横向的空间分辨率分别为0.016和0.265微米。测量了与111个基本布拉格反射和卫星反射有关的沿晶体截断棒的强度分布，并使用Petrashen-Chukhovskii算法反演了每个反射的位相信息。用序贯试验法和局部能量最小法确定了卫星反射的相对相位，得到了两幅同样可信的图。用单片式三反射非对称通道切割单色仪和1.54-*X射线分析仪获得了聚合物基质中空洞和玻璃纤维的X射线相衬图像。详细讨论了空洞和玻璃纤维图像的对比度形成机理，并对图像进行了数值模拟，得到了与实验一致的结果。

Two-dimensional lattice distortions in ion-implanted silicon crystals have been mapped out with spatial resolutions of 0.016 and 0.265 mum in the depth and lateral directions respectively using synchrotron X-ray diffractometry data. Intensity profiles along the crystal-truncation-rods associated with the fundamental 111 Bragg reflections and satellite reflections were measured and phase information was retrieved using the Petrashen-Chukhovskii algorithm for each reflection. Two equally plausible maps have been obtained by determining the relative phases of the satellite reflections with a sequential trial method and a local energy-minimum method.X-ray phase-contrast images of voids and glass fibers in a polymer matrix has been obtained using both a monolithic 3-reflection asymmetric channel-cut monochromator and analyzer with 1.54-* X-rays. The mechanism of contrast formation in the images of voids and glass fibers are discussed in detail and numerical simulations of the images are found to agree with the experiments.