Basic research on 3-Dimensional integrated optics

本研究工作的目的是对多层波导叠加及其耦合的可行性进行理论和实验研究，为实现超功能集成光学器件的“三维集成光学”工程奠定基础。本研究获得的值得注意的结果如下：1。从理论上研究了光栅耦合器在堆叠两层波导间的耦合。实验证实了两层波导光栅耦合器的窄带滤波特性。提出并演示了由两种光栅耦合器集成在两层波导中的集成光偏振旋转传感器。通过对无机薄膜和有机薄膜的叠加和图案化，证实了波在波导中的传播。研究了ArF激光烧蚀法制备LiNbO3薄膜的异质外延生长。研究了c型切割蓝宝石上LiNbO3光波导薄膜的晶体轴向、化学计量、传输损耗和电光效应。提出并演示了一种新型聚合物波导功能光栅耦合器。通过微调导模指数，实现光栅耦合器从波导输出光束的开启和关闭。实现了光栅耦合器与QW-DFB激光器的单片集成。提出并演示了单片集成光学位置/位移传感器。

The aim of this research works is theoretical and experimental investigation on the feasibility of stacked multi-story waveguides and coupling between them in order to establish the basis of "3-Dimensional Integrated Optics" engineering for realization of super-functional integrated optic devices. Noticeable results obtained in this research are listed below.1.Coupling between stacked two-story waveguides by grating couplers was studied theoretically.2.Narrow-band wavelength filtering properties in grating couplers in two-story waveguides was experimentally confirmed.3.Integrated-optic polarization rotation sensor consisting of two types of grating couplers integrated in two-story waveguide was proposed and demonstrated.4.Wave propagation was confirmed in the waveguide fabricated by stacking and patterning inorganic films and organic films.5.Heteroepitaxial growth of LiNbO3 film by ArF laser ablation was studied. Crystal axis orientation, stoichiometry, propagation loss and electrooptic effect of LiNbO3 optical-waveguide film on c-cut sapphire were characterized.6.New functional grating coupler fabricated in polymer waveguide was proposed and demonstrated. The output beam from the waveguide by the grating coupler was turned on and off by fine-tuning the guided mode index.7.Monolithic integration of grating coupler and QW-DFB laser was achieved. Monolithic integrated optic position/displacement sensor was proposed and demonstrated.