An Absolute Evaluation of Systematic Error of High-Precision Spindle

在本研究中，我们采用向量表示法代替Lissajous方法，建立了精密主轴的绝对评价方法。该方法在X-Y图上画出主轴的偏移量作为偏移量及其方向的矢量轨迹。该方法可以消除Lissajous方法的模糊性，并对偏差的大小进行绝对的估计。在分离和消除系统误差以有效实现高性能的情况下，该技术是有用的。通过测量轴向不同的两个平面上的四个径向偏差，同时测量径向运动和圆锥运动。此外，通过另一个传感器测量轴向偏差，可以捕获所有的系统误差运动。首先制作了测试系统，然后消除了主球偏心的影响。其次，采用多步法对主球的形状误差和主轴的系统误差进行了评定。由此可以得到系统误差的偏差大小及其方向。我们将主轴误差表示为X-Y坐标上的矢量。通过对系统误差的精确检测，发现系统误差不能用Lissajous方法精确表示。不同速度下测量的系统误差略有不同。锥形运动的形式也不同于径向运动的形式。本研究将引导下一步的研究课题，如主轴误差与动力系统的关系、系统误差与形状误差等。

In this research, we have established an absolute evaluation of precision spindle by developing vector representation method instead of Lissajous' method. In a new method a deviation of spindle axis is drawn en X-Y chart as vector locus of deviation magnitude and its direction. By this method it is possible to eliminate vagueness of Lissajous' method and to evaluate the magnitude of deviation absolutely. This technique is usefull in a case that separation and elimination of systematic erroe is effective to achieve high performance. By measuring four radial deviations in axially different two plane rectangular to spindle axis, a radial motion and conical motion are measured at same time. Moreover by measuring axial deviation by another sensor, it is possible to catch all of systematic error motion.First of all we made test system, then eliminate the effect of off-center of master ball. Secondly we evaluate the form error of master ball and the systematic error of spindle by multi step method. So we can get the systematic error in the value of deviation magunitude and its orientation. We represent this spindle error as vector on X-Y coordinate.As a results, a systematic error is detected accurately and it is found that the systematic error cannot be represented exactly by Lissajous' method. Systematic errors measured in different velocity are slightly different each other. The form of conical motion is also different from the form of radial motion. This research leads next research themes, for example a relation of spindle error and its dynamical system, systematic error and form error, etc.