Basic Study on Ultra-Precision Self-Profile-Generation

应用软件基准技术，提出了一种新的超精密自轮廓生成系统。在本研究中，我们首先开发了一种新型研磨探头，同时作为力控制的位移探头。该探头利用原子力显微镜的原理，由一个力敏感杆和一个安装在紫菜中心的研磨垫和用于测量力杆倾角的光学探测器组成。杠杆的两端由PZT致动器保持。可以通过使用PZT致动器调节杠杆的倾斜度来控制加工力。另一方面，也可以从杠杆的倾斜度获得轮廓高度。标定结果表明，所研制的探头具有10 nm的位移分辨率。接下来，我们研究了使用三种新的研磨和测量探头扫描研磨轮廓测量的可能性。轮廓测量的方法是基于三点法构建软件基准。利用三个测头的输出数据信息，消除扫描运动中的俯仰误差和平移误差，可以实现具有测头精度的轮廓度测量。计算机仿真结果表明，采用绝对齿形测量技术可以检测并补偿软件基准法评定的研磨垫磨损量的抛物线误差。新系统的有效性也得到了轮廓测量和加工实验的验证。

A new ultra-precision self-profile-generation system by applying the technique of software datum has been proposed. In this research, we first developed a new kind of lapping probe that simultaneously acts as a force-controlled displacement probe. This probe, which utilize the principle of AFM,consists of a force sensing lever with a lapping pad attached at the center of the laver and optical detectors to measure the inclination of the lever. Both ends of the lever are held by PZT actuators. The machining force can be controlled by adjusting the inclination of the lever using the PZT actuators. On the other hand, the profile height can also be obtained from the inclination of the lever. Calibration results showed that the developed probe has a displacement resolution of 10nm. Next, we investigated the possibility of using three of the new lapping and measuring probes for scanning measurements of lapped profiles. The method of profile measurements is based on the 3-point method for constructing software datum. Profile measurements can be realized with the accuracy of the probe by canceling the pitching error and the translational error in the scanning motion using the information of the output data of the three probes. Computer simulations showed that abrasion amount of the lapping pad which results in a parabolic error in the evaluated profile with the method of software datum can be detected and compensated by using the proposed technique of absolute profile measurements. The effectiveness of the new system has also been confirmed by profile measurement and machining experiments.