Study on Industrialization of Precise Non-contact Type Coordinate Measuring Machine with 5 Controlled Axs

研制了一种高精度五轴可控非接触式空间坐标测量机。虽然市场上有一些非接触式空间坐标测量机，但由于缺乏探头运动自由度和有用的测量软件，它们没有足够的灵活性。在本研究中，我们开发了一种新的机器，它具有足够的精度和灵活性，以满足实际使用的要求。设计了一种带有高精度旋转编码器的新型探头倾斜系统，并开发了各轴控制系统，以获得精确和灵活的运动。将该系统应用于蔡司ZKM250四轴可控测量机上，并对改造后的五轴可控测量机进行了性能测试。控制系统的各轴定位精度均小于0.17 ma （x, y）和2.5sec(xw, yw)，以保证标准偏差的重复性。通过非接触式探针，包括标本边缘在内的显微图像被捕获到计算机中。用图像检测边缘的坐标。为了获得捕获图像小于一个像素大小（约5mum）的高检测分辨率，开发了亚像素图像处理方法。通过这种方法，探测系统的分辨率达到了亚微米级。为了提高机床的实用性，开发了一套全面的螺杆、滚刀自动精密测量软件。该软件对螺杆的导联误差的测量精度为0.15 μ m，可在标准偏差中重复性。测量6根螺纹的一次所需时间为10分钟。研究发现，与传统的人工测量相比，综合自动测量软件缩短了测量时间，显著提高了重复性的精度。研究表明，该五轴可控非接触式空间坐标测量机精度高，实用性强。

A high precision 5 axs controllable non-contact-type spatial coordinate measuring machine is developed. Although some non-contact-type spatial coordinate measuring machines are on the market, they don't have enough flexibility due to the lack of probe motion degree of freedom and useful measuring software. In this study, we develope a new machine which has enough precision and flexibility to satisfy requirements of practial use.A new probe inclination system with high precision rotary encoder is designed and an each axis control system is developed to obtain accurate and flexible motions. These system are applied to a 4 axs controllable measuring machine (Zeiss ZKM250) and the performance of remodeled 5 axs controllable machine is inspected .Each axis precision of positioning by the control system are less than 0.17mum(x, y) and 2.5sec(xw, yw) for repeatability in standard deviation.By the non-contact-type probe, microscopic images including edges of the specimen are captured into a computer. The coordinate of the edges are detected with the images. To obtain high detection resolution smaller than one pixel size (about 5mum) of captured images, the sub pixel image processing method is developed. By this method, the probing system comes up to sub-micro meter resolution.In order to improve the utility of this machine, a comprehensive automatic precision measuring software for screws and gear-hobs is developed. The precision of measurement by this software for the lead error in a screw is 0.15mum for repeatability in standard deviation. The required time for one measurement of 6 threads screw is 10 minutes. It is found that the comprehensive automatic measuring software shortens the measuring time and improves the precision of repeatability significantly compared with the conventional manual measurement.It is shown by this study that this 5 axs controllable non-contact-type spatial coordinate measuring machine has high precision and high usability.