EVALUATION OF FRICTION-WEAR PROPERTIES OF DLC FILMS PRODUCED BY PLASMA CVD

采用等离子体CVD和离子镀方法在不锈钢、低碳钢、高速工具钢和纯钛表面沉积TiN薄膜、类金刚石薄膜和金刚石薄膜。讨论了陶瓷薄膜、类金刚石薄膜和金刚石薄膜的沉积条件和成核反应对薄膜附着力、硬度、摩擦磨损性能的影响。结果表明：1）TiN薄膜的附着力和摩擦磨损性能与TiN的微观结构、层数、层压顺序密切相关; 2）采用等离子体CVD技术研究了金刚石在纯钛表面的成核反应，基体的几何形状通过改变气体流量对金刚石的成核反应产生影响。3）采用射频等离子体化学气相沉积法在镀有硅膜的不锈钢基体上沉积类金刚石薄膜，类金刚石薄膜与基体的结合力主要受类金刚石薄膜与基体之间的过渡层的影响。类金刚石膜的耐磨性取决于膜层的结合力。4）采用离子镀方法在高速工具钢表面直接沉积类金刚石碳膜。涂层DLC膜改善了基体的磨损性能。但是，磨损的改善与相反的材料不同。

TiN thin films, diamond like carbon films and diamond films were deposited by using plasma CVD and ion plating methods on the stainless steel, mild steel, high speed tool steel and pure titanium. The adhesion, hardness, friction and wear properties of ceramic thin films, DLC films and diamond films were discussed with the deposition condition and nucreation. The obtained results were as follows.1) Adhesion and friction-wear behavior of laminated TiN films strongly depended on the microstructure of TiN,the laminated number, the order of lamination.2) The nucreation of diamond on pure titanium was discussed by using plasma CVD.The nucreation of diamond was affected by the geometry of substrate which changed the gas flow. Then, the diamond crystal was grown with diamond like carbon on pure titanium.3) The diamon like carbon films were deposited on stainless steel with silicon film by using radio frequency plasma CVD.The adhesion of DLC films was strongly effected by the interlayr between DLC film and substrate. The wear behavior of DLC films depended on the adhesion of films.4) The deamond like carbon films was directly deposited on high speed tool steel using ion plating method. The wear properties of substrate were improved by the coating DLC films. But, the improvement of wear was different with the opposite materials.