New Assembly Technique of Three Dimensional Micro-structure by YAG Laser Beam

本文重点研究了一种新的YAG激光微装配技术。二氧化硅微粒悬浮在纯碱玻璃板上，受到上层单光束照射，可沿光轴在空气中被捕获。首次发现了悬浮和困在空气中的现象。此外，我们还发现除了辐射力梯度外，还有一些未知的因素引起了悬浮的发生。捕获的粒子可以在完全三维方向上进行操作。这种新的三维操纵技术有望在未来成为一种有效的微装配处理技术。因此，用所提出的技术验证了由细颗粒构成的微结构的组装。在目前的技术中，粒子可以在水平方向和垂直方向上组装。基于水平和垂直装配能力，可以创建四面体等三维微结构。

The focus of this study is on a newly developed micro-assembly technique by YAG laser beam. Silica fine particle is levitated and can be trapped along optical axis in the air, as it on soda glass plate is irradiated single-beam from upper. The levitation and the trapping in the air are discovered for the first time. Furthermore, we find out that a occurrence of the levitation is caused by some other unknown factors besides gradient of radiation force. The trapped particle can be manipulated in fully three dimensional orientation. This new 3D-manipulation technique is expected to be an effective handling technique for micro-assembly in the future. Hence assembling of a micro-structure, which is constructed by fine particles, is verified with the presented technique. In present technique, particles can be assembled in horizontal and vertical direction. Based on the horizontal and vertical assembly capability, 3D micro-structure like tetrahedron and so on, can be created.