Study on LIGA Fabrication of Micro-Structured Actuating Film and Its Driving Characteristics.

本研究开发了一种采用LIGA技术制备的具有数百微米镍核精细结构的聚合物涂层微结构驱动膜及其特性，作为机电一体化领域的一种新型功能材料。主要研究成果如下：（1）镍核精细结构薄膜的形状设计及其驱动性能模拟（2）LIGA工艺设计（3）掩模数据的生成及掩模的制作（4）一些基础技术（PMMA与Al基板的叠层、Ni的非电镀最佳条件、聚合物涂层技术等）的研究。（6）镍芯微结构薄膜驱动性能的基础实验研究（这是用毫米级的类似薄膜进行的）。由于为该研究提供高能X射线辐射的“新斯巴鲁”的工作计划被严重推迟，聚合物涂层微结构致动膜无法完成制造，该研究的公开不得不推迟到下一个财政年度，这是非常遗憾的。

This research develops polymer coating micro-structured actuating film and its characteristics, which is fabricated by LIGA technology and has Ni core fine structure of several hundreds micrometer in thickness, as a new functional material in the field of mechatronics. The main fruits are following :(1)Shape design of Ni core fine structure film and the simulation of its driving performances(2)Design of LIGA process(3)Generation of mask data and fabrication of masks(4)Study on some basic technique (lamination of PMMA and Al-substrate, optimum condition for nonelectroplating of Ni, technique for polymer coating etc.)(6)basic experimental study on driving performance of Ni core micro-structured film (This was done by using millimeter size similar film.)By the reason why the working plan of "New Subaru", where high energy X-ray radiation was to be provided for this research, has been seriously delayed, it is very regrettable that the polymer coating micro-structured actuating film could not be completed in fabrication and the publicity on this research has to be delayed to the next fiscal year.